10/8/2010	8:57:10 AM	Main Vac valve closed
10/8/2010	8:57:11 AM	Bypass valve closed
10/8/2010	8:57:33 AM	Bypass valve opened
10/8/2010	8:57:36 AM	Main Vac valve opened
10/8/2010	9:03:02 AM	Recipe started at 9:03 AM
10/8/2010	9:03:02 AM	Helium valve closed
10/8/2010	9:03:02 AM	BCl3 valve closed
10/8/2010	9:03:02 AM	PH3 valve closed
10/8/2010	9:03:02 AM	SiCl4 pre valve closed
10/8/2010	9:03:02 AM	SiCl4 post valve closed
10/8/2010	9:03:02 AM	Main Vac valve closed
10/8/2010	9:03:02 AM	Bypass valve closed
10/8/2010	9:03:02 AM	Bubbler valve closed
10/8/2010	9:03:02 AM	H2 valve opened
10/8/2010	9:03:02 AM	Helium MFC set to  0.000000
10/8/2010	9:03:02 AM	H2 MFC set to  500.000000
10/8/2010	9:03:02 AM	BCl3 MFC set to  0.000000
10/8/2010	9:03:02 AM	PHl3 MFC set to  0.000000
10/8/2010	9:03:02 AM	SiCl4 MFC set to  0.000000
10/8/2010	9:03:02 AM	Bypass solenoid MFC set to  0.000000
10/8/2010	9:03:02 AM	Tube furnace set to 100
10/8/2010	9:04:24 AM	Helium valve closed
10/8/2010	9:04:24 AM	BCl3 valve closed
10/8/2010	9:04:24 AM	PH3 valve closed
10/8/2010	9:04:24 AM	SiCl4 pre valve closed
10/8/2010	9:04:24 AM	SiCl4 post valve closed
10/8/2010	9:04:24 AM	Main Vac valve closed
10/8/2010	9:04:24 AM	Bypass valve closed
10/8/2010	9:04:24 AM	H2 valve opened
10/8/2010	9:04:24 AM	Bubbler valve opened
10/8/2010	9:04:24 AM	Helium MFC set to  0.000000
10/8/2010	9:04:24 AM	H2 MFC set to  400.000000
10/8/2010	9:04:24 AM	BCl3 MFC set to  0.000000
10/8/2010	9:04:24 AM	PHl3 MFC set to  0.000000
10/8/2010	9:04:24 AM	SiCl4 MFC set to  0.000000
10/8/2010	9:04:24 AM	Bypass solenoid MFC set to  0.000000
10/8/2010	9:04:25 AM	Tube furnace set to 1000
10/8/2010	9:24:25 AM	Helium valve closed
10/8/2010	9:24:25 AM	PH3 valve closed
10/8/2010	9:24:25 AM	Main Vac valve closed
10/8/2010	9:24:25 AM	Bypass valve closed
10/8/2010	9:24:25 AM	H2 valve opened
10/8/2010	9:24:25 AM	BCl3 valve opened
10/8/2010	9:24:25 AM	SiCl4 pre valve opened
10/8/2010	9:24:25 AM	SiCl4 post valve opened
10/8/2010	9:24:25 AM	Bubbler valve opened
10/8/2010	9:24:25 AM	Helium MFC set to  0.000000
10/8/2010	9:24:25 AM	H2 MFC set to  500.000000
10/8/2010	9:24:25 AM	BCl3 MFC set to  12.000000
10/8/2010	9:24:25 AM	PHl3 MFC set to  0.000000
10/8/2010	9:24:25 AM	SiCl4 MFC set to  50.000000
10/8/2010	9:24:25 AM	Bypass solenoid MFC set to  0.000000
10/8/2010	9:24:25 AM	Tube furnace set to 1000
10/8/2010	9:37:25 AM	Helium valve closed
10/8/2010	9:37:25 AM	BCl3 valve closed
10/8/2010	9:37:25 AM	PH3 valve closed
10/8/2010	9:37:25 AM	SiCl4 pre valve closed
10/8/2010	9:37:25 AM	SiCl4 post valve closed
10/8/2010	9:37:25 AM	Main Vac valve closed
10/8/2010	9:37:25 AM	Bypass valve closed
10/8/2010	9:37:25 AM	H2 valve opened
10/8/2010	9:37:25 AM	Bubbler valve opened
10/8/2010	9:37:25 AM	Helium MFC set to  0.000000
10/8/2010	9:37:25 AM	H2 MFC set to  400.000000
10/8/2010	9:37:25 AM	BCl3 MFC set to  0.000000
10/8/2010	9:37:25 AM	PHl3 MFC set to  0.000000
10/8/2010	9:37:25 AM	SiCl4 MFC set to  0.000000
10/8/2010	9:37:25 AM	Bypass solenoid MFC set to  0.000000
10/8/2010	9:37:25 AM	Tube furnace set to 0
10/8/2010	9:42:25 AM	H2 valve closed
10/8/2010	9:42:25 AM	BCl3 valve closed
10/8/2010	9:42:25 AM	PH3 valve closed
10/8/2010	9:42:25 AM	SiCl4 pre valve closed
10/8/2010	9:42:25 AM	SiCl4 post valve closed
10/8/2010	9:42:25 AM	Main Vac valve closed
10/8/2010	9:42:25 AM	Bypass valve closed
10/8/2010	9:42:25 AM	Helium valve opened
10/8/2010	9:42:25 AM	Bubbler valve opened
10/8/2010	9:42:25 AM	Helium MFC set to  500.000000
10/8/2010	9:42:25 AM	H2 MFC set to  0.000000
10/8/2010	9:42:25 AM	BCl3 MFC set to  0.000000
10/8/2010	9:42:25 AM	PHl3 MFC set to  0.000000
10/8/2010	9:42:25 AM	SiCl4 MFC set to  0.000000
10/8/2010	9:42:25 AM	Bypass solenoid MFC set to  0.000000
10/8/2010	9:42:25 AM	Tube furnace set to 0
10/8/2010	9:57:25 AM	Helium valve closed
10/8/2010	9:57:25 AM	H2 valve closed
10/8/2010	9:57:25 AM	BCl3 valve closed
10/8/2010	9:57:25 AM	PH3 valve closed
10/8/2010	9:57:25 AM	SiCl4 pre valve closed
10/8/2010	9:57:25 AM	SiCl4 post valve closed
10/8/2010	9:57:25 AM	Main Vac valve closed
10/8/2010	9:57:25 AM	Bypass valve closed
10/8/2010	9:57:25 AM	Bubbler valve closed
10/8/2010	9:57:25 AM	Helium MFC set to  0.000000
10/8/2010	9:57:25 AM	H2 MFC set to  0.000000
10/8/2010	9:57:25 AM	BCl3 MFC set to  0.000000
10/8/2010	9:57:25 AM	PHl3 MFC set to  0.000000
10/8/2010	9:57:25 AM	SiCl4 MFC set to  0.000000
10/8/2010	9:57:25 AM	Bypass solenoid MFC set to  0.000000
10/8/2010	9:57:25 AM	Tube furnace set to 0
10/8/2010	9:57:25 AM	Run finished at 9:57 AM
10/8/2010	10:02:41 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/8/2010	10:02:52 AM	Recipe started at 10:02 AM
10/8/2010	10:02:52 AM	Helium valve closed
10/8/2010	10:02:52 AM	H2 valve closed
10/8/2010	10:02:52 AM	BCl3 valve closed
10/8/2010	10:02:52 AM	PH3 valve closed
10/8/2010	10:02:52 AM	SiCl4 pre valve closed
10/8/2010	10:02:52 AM	SiCl4 post valve closed
10/8/2010	10:02:52 AM	Main Vac valve closed
10/8/2010	10:02:52 AM	Bubbler valve closed
10/8/2010	10:02:52 AM	Bypass valve opened
10/8/2010	10:02:52 AM	Helium MFC set to  0.000000
10/8/2010	10:02:52 AM	H2 MFC set to  0.000000
10/8/2010	10:02:52 AM	BCl3 MFC set to  0.000000
10/8/2010	10:02:52 AM	PHl3 MFC set to  0.000000
10/8/2010	10:02:52 AM	SiCl4 MFC set to  0.000000
10/8/2010	10:02:52 AM	Bypass solenoid MFC set to  0.000000
10/8/2010	10:02:52 AM	Tube furnace set to 0
10/8/2010	10:03:41 AM	Helium valve closed
10/8/2010	10:03:41 AM	H2 valve closed
10/8/2010	10:03:41 AM	BCl3 valve closed
10/8/2010	10:03:41 AM	PH3 valve closed
10/8/2010	10:03:41 AM	SiCl4 pre valve closed
10/8/2010	10:03:41 AM	SiCl4 post valve closed
10/8/2010	10:03:41 AM	Bubbler valve closed
10/8/2010	10:03:41 AM	Main Vac valve opened
10/8/2010	10:03:41 AM	Bypass valve opened
10/8/2010	10:03:41 AM	Helium MFC set to  0.000000
10/8/2010	10:03:41 AM	H2 MFC set to  0.000000
10/8/2010	10:03:41 AM	BCl3 MFC set to  0.000000
10/8/2010	10:03:41 AM	PHl3 MFC set to  0.000000
10/8/2010	10:03:41 AM	SiCl4 MFC set to  0.000000
10/8/2010	10:03:41 AM	Bypass solenoid MFC set to  0.000000
10/8/2010	10:03:41 AM	Tube furnace set to 0
10/8/2010	10:04:41 AM	H2 valve closed
10/8/2010	10:04:41 AM	BCl3 valve closed
10/8/2010	10:04:41 AM	PH3 valve closed
10/8/2010	10:04:41 AM	SiCl4 pre valve closed
10/8/2010	10:04:41 AM	SiCl4 post valve closed
10/8/2010	10:04:41 AM	Bubbler valve closed
10/8/2010	10:04:41 AM	Helium valve opened
10/8/2010	10:04:41 AM	Main Vac valve opened
10/8/2010	10:04:41 AM	Bypass valve opened
10/8/2010	10:04:41 AM	Helium MFC set to  100.000000
10/8/2010	10:04:41 AM	H2 MFC set to  0.000000
10/8/2010	10:04:41 AM	BCl3 MFC set to  0.000000
10/8/2010	10:04:41 AM	PHl3 MFC set to  0.000000
10/8/2010	10:04:41 AM	SiCl4 MFC set to  0.000000
10/8/2010	10:04:41 AM	Bypass solenoid MFC set to  0.000000
10/8/2010	10:04:41 AM	Tube furnace set to 0
10/8/2010	10:05:41 AM	Helium valve closed
10/8/2010	10:05:41 AM	H2 valve closed
10/8/2010	10:05:41 AM	BCl3 valve closed
10/8/2010	10:05:41 AM	PH3 valve closed
10/8/2010	10:05:41 AM	SiCl4 pre valve closed
10/8/2010	10:05:41 AM	SiCl4 post valve closed
10/8/2010	10:05:41 AM	Bubbler valve closed
10/8/2010	10:05:41 AM	Main Vac valve opened
10/8/2010	10:05:41 AM	Bypass valve opened
10/8/2010	10:05:41 AM	Helium MFC set to  0.000000
10/8/2010	10:05:41 AM	H2 MFC set to  0.000000
10/8/2010	10:05:41 AM	BCl3 MFC set to  0.000000
10/8/2010	10:05:41 AM	PHl3 MFC set to  0.000000
10/8/2010	10:05:41 AM	SiCl4 MFC set to  0.000000
10/8/2010	10:05:41 AM	Bypass solenoid MFC set to  0.000000
10/8/2010	10:05:41 AM	Tube furnace set to 0
10/8/2010	10:06:41 AM	H2 valve closed
10/8/2010	10:06:41 AM	BCl3 valve closed
10/8/2010	10:06:41 AM	PH3 valve closed
10/8/2010	10:06:41 AM	SiCl4 pre valve closed
10/8/2010	10:06:41 AM	SiCl4 post valve closed
10/8/2010	10:06:41 AM	Bubbler valve closed
10/8/2010	10:06:41 AM	Helium valve opened
10/8/2010	10:06:41 AM	Main Vac valve opened
10/8/2010	10:06:41 AM	Bypass valve opened
10/8/2010	10:06:41 AM	Helium MFC set to  100.000000
10/8/2010	10:06:41 AM	H2 MFC set to  0.000000
10/8/2010	10:06:41 AM	BCl3 MFC set to  0.000000
10/8/2010	10:06:41 AM	PHl3 MFC set to  0.000000
10/8/2010	10:06:41 AM	SiCl4 MFC set to  0.000000
10/8/2010	10:06:41 AM	Bypass solenoid MFC set to  0.000000
10/8/2010	10:06:41 AM	Tube furnace set to 0
10/8/2010	10:07:41 AM	Helium valve closed
10/8/2010	10:07:41 AM	H2 valve closed
10/8/2010	10:07:41 AM	BCl3 valve closed
10/8/2010	10:07:41 AM	PH3 valve closed
10/8/2010	10:07:41 AM	SiCl4 pre valve closed
10/8/2010	10:07:41 AM	SiCl4 post valve closed
10/8/2010	10:07:41 AM	Bubbler valve closed
10/8/2010	10:07:41 AM	Main Vac valve opened
10/8/2010	10:07:41 AM	Bypass valve opened
10/8/2010	10:07:41 AM	Helium MFC set to  0.000000
10/8/2010	10:07:41 AM	H2 MFC set to  0.000000
10/8/2010	10:07:41 AM	BCl3 MFC set to  0.000000
10/8/2010	10:07:41 AM	PHl3 MFC set to  0.000000
10/8/2010	10:07:41 AM	SiCl4 MFC set to  0.000000
10/8/2010	10:07:41 AM	Bypass solenoid MFC set to  0.000000
10/8/2010	10:07:42 AM	Tube furnace set to 0
10/8/2010	10:08:42 AM	H2 valve closed
10/8/2010	10:08:42 AM	BCl3 valve closed
10/8/2010	10:08:42 AM	PH3 valve closed
10/8/2010	10:08:42 AM	SiCl4 pre valve closed
10/8/2010	10:08:42 AM	SiCl4 post valve closed
10/8/2010	10:08:42 AM	Bubbler valve closed
10/8/2010	10:08:42 AM	Helium valve opened
10/8/2010	10:08:42 AM	Main Vac valve opened
10/8/2010	10:08:42 AM	Bypass valve opened
10/8/2010	10:08:42 AM	Helium MFC set to  100.000000
10/8/2010	10:08:42 AM	H2 MFC set to  0.000000
10/8/2010	10:08:42 AM	BCl3 MFC set to  0.000000
10/8/2010	10:08:42 AM	PHl3 MFC set to  0.000000
10/8/2010	10:08:42 AM	SiCl4 MFC set to  0.000000
10/8/2010	10:08:42 AM	Bypass solenoid MFC set to  0.000000
10/8/2010	10:08:42 AM	Tube furnace set to 0
10/8/2010	10:09:42 AM	Helium valve closed
10/8/2010	10:09:42 AM	H2 valve closed
10/8/2010	10:09:42 AM	BCl3 valve closed
10/8/2010	10:09:42 AM	PH3 valve closed
10/8/2010	10:09:42 AM	SiCl4 pre valve closed
10/8/2010	10:09:42 AM	SiCl4 post valve closed
10/8/2010	10:09:42 AM	Bubbler valve closed
10/8/2010	10:09:42 AM	Main Vac valve opened
10/8/2010	10:09:42 AM	Bypass valve opened
10/8/2010	10:09:42 AM	Helium MFC set to  0.000000
10/8/2010	10:09:42 AM	H2 MFC set to  0.000000
10/8/2010	10:09:42 AM	BCl3 MFC set to  0.000000
10/8/2010	10:09:42 AM	PHl3 MFC set to  0.000000
10/8/2010	10:09:42 AM	SiCl4 MFC set to  0.000000
10/8/2010	10:09:42 AM	Bypass solenoid MFC set to  0.000000
10/8/2010	10:09:42 AM	Tube furnace set to 0
10/8/2010	10:10:42 AM	H2 valve closed
10/8/2010	10:10:42 AM	BCl3 valve closed
10/8/2010	10:10:42 AM	PH3 valve closed
10/8/2010	10:10:42 AM	SiCl4 pre valve closed
10/8/2010	10:10:42 AM	SiCl4 post valve closed
10/8/2010	10:10:42 AM	Bubbler valve closed
10/8/2010	10:10:42 AM	Helium valve opened
10/8/2010	10:10:42 AM	Main Vac valve opened
10/8/2010	10:10:42 AM	Bypass valve opened
10/8/2010	10:10:42 AM	Helium MFC set to  100.000000
10/8/2010	10:10:42 AM	H2 MFC set to  0.000000
10/8/2010	10:10:42 AM	BCl3 MFC set to  0.000000
10/8/2010	10:10:42 AM	PHl3 MFC set to  0.000000
10/8/2010	10:10:42 AM	SiCl4 MFC set to  0.000000
10/8/2010	10:10:42 AM	Bypass solenoid MFC set to  0.000000
10/8/2010	10:10:42 AM	Tube furnace set to 0
10/8/2010	10:11:42 AM	Helium valve closed
10/8/2010	10:11:42 AM	H2 valve closed
10/8/2010	10:11:42 AM	BCl3 valve closed
10/8/2010	10:11:42 AM	PH3 valve closed
10/8/2010	10:11:42 AM	SiCl4 pre valve closed
10/8/2010	10:11:42 AM	SiCl4 post valve closed
10/8/2010	10:11:42 AM	Bubbler valve closed
10/8/2010	10:11:42 AM	Main Vac valve opened
10/8/2010	10:11:42 AM	Bypass valve opened
10/8/2010	10:11:42 AM	Helium MFC set to  0.000000
10/8/2010	10:11:42 AM	H2 MFC set to  0.000000
10/8/2010	10:11:42 AM	BCl3 MFC set to  0.000000
10/8/2010	10:11:42 AM	PHl3 MFC set to  0.000000
10/8/2010	10:11:42 AM	SiCl4 MFC set to  0.000000
10/8/2010	10:11:42 AM	Bypass solenoid MFC set to  0.000000
10/8/2010	10:11:42 AM	Tube furnace set to 0
10/8/2010	10:12:42 AM	H2 valve closed
10/8/2010	10:12:42 AM	BCl3 valve closed
10/8/2010	10:12:42 AM	PH3 valve closed
10/8/2010	10:12:42 AM	SiCl4 pre valve closed
10/8/2010	10:12:42 AM	SiCl4 post valve closed
10/8/2010	10:12:42 AM	Bubbler valve closed
10/8/2010	10:12:42 AM	Helium valve opened
10/8/2010	10:12:42 AM	Main Vac valve opened
10/8/2010	10:12:42 AM	Bypass valve opened
10/8/2010	10:12:42 AM	Helium MFC set to  100.000000
10/8/2010	10:12:42 AM	H2 MFC set to  0.000000
10/8/2010	10:12:42 AM	BCl3 MFC set to  0.000000
10/8/2010	10:12:42 AM	PHl3 MFC set to  0.000000
10/8/2010	10:12:42 AM	SiCl4 MFC set to  0.000000
10/8/2010	10:12:42 AM	Bypass solenoid MFC set to  0.000000
10/8/2010	10:12:43 AM	Tube furnace set to 0
10/8/2010	10:13:43 AM	Helium valve closed
10/8/2010	10:13:43 AM	H2 valve closed
10/8/2010	10:13:43 AM	BCl3 valve closed
10/8/2010	10:13:43 AM	PH3 valve closed
10/8/2010	10:13:43 AM	SiCl4 pre valve closed
10/8/2010	10:13:43 AM	SiCl4 post valve closed
10/8/2010	10:13:43 AM	Bubbler valve closed
10/8/2010	10:13:43 AM	Main Vac valve opened
10/8/2010	10:13:43 AM	Bypass valve opened
10/8/2010	10:13:43 AM	Helium MFC set to  0.000000
10/8/2010	10:13:43 AM	H2 MFC set to  0.000000
10/8/2010	10:13:43 AM	BCl3 MFC set to  0.000000
10/8/2010	10:13:43 AM	PHl3 MFC set to  0.000000
10/8/2010	10:13:43 AM	SiCl4 MFC set to  0.000000
10/8/2010	10:13:43 AM	Bypass solenoid MFC set to  0.000000
10/8/2010	10:13:43 AM	Tube furnace set to 0
10/8/2010	10:14:43 AM	H2 valve closed
10/8/2010	10:14:43 AM	BCl3 valve closed
10/8/2010	10:14:43 AM	PH3 valve closed
10/8/2010	10:14:43 AM	SiCl4 pre valve closed
10/8/2010	10:14:43 AM	SiCl4 post valve closed
10/8/2010	10:14:43 AM	Bubbler valve closed
10/8/2010	10:14:43 AM	Helium valve opened
10/8/2010	10:14:43 AM	Main Vac valve opened
10/8/2010	10:14:43 AM	Bypass valve opened
10/8/2010	10:14:43 AM	Helium MFC set to  100.000000
10/8/2010	10:14:43 AM	H2 MFC set to  0.000000
10/8/2010	10:14:43 AM	BCl3 MFC set to  0.000000
10/8/2010	10:14:43 AM	PHl3 MFC set to  0.000000
10/8/2010	10:14:43 AM	SiCl4 MFC set to  0.000000
10/8/2010	10:14:43 AM	Bypass solenoid MFC set to  0.000000
10/8/2010	10:14:43 AM	Tube furnace set to 0
10/8/2010	10:15:43 AM	Helium valve closed
10/8/2010	10:15:43 AM	H2 valve closed
10/8/2010	10:15:43 AM	BCl3 valve closed
10/8/2010	10:15:43 AM	PH3 valve closed
10/8/2010	10:15:43 AM	SiCl4 pre valve closed
10/8/2010	10:15:43 AM	SiCl4 post valve closed
10/8/2010	10:15:43 AM	Bubbler valve closed
10/8/2010	10:15:43 AM	Main Vac valve opened
10/8/2010	10:15:43 AM	Bypass valve opened
10/8/2010	10:15:43 AM	Helium MFC set to  0.000000
10/8/2010	10:15:43 AM	H2 MFC set to  0.000000
10/8/2010	10:15:43 AM	BCl3 MFC set to  0.000000
10/8/2010	10:15:43 AM	PHl3 MFC set to  0.000000
10/8/2010	10:15:43 AM	SiCl4 MFC set to  0.000000
10/8/2010	10:15:43 AM	Bypass solenoid MFC set to  0.000000
10/8/2010	10:15:43 AM	Tube furnace set to 0
10/8/2010	10:16:43 AM	H2 valve closed
10/8/2010	10:16:43 AM	BCl3 valve closed
10/8/2010	10:16:43 AM	PH3 valve closed
10/8/2010	10:16:43 AM	SiCl4 pre valve closed
10/8/2010	10:16:43 AM	SiCl4 post valve closed
10/8/2010	10:16:43 AM	Bubbler valve closed
10/8/2010	10:16:43 AM	Helium valve opened
10/8/2010	10:16:43 AM	Main Vac valve opened
10/8/2010	10:16:43 AM	Bypass valve opened
10/8/2010	10:16:43 AM	Helium MFC set to  100.000000
10/8/2010	10:16:43 AM	H2 MFC set to  0.000000
10/8/2010	10:16:43 AM	BCl3 MFC set to  0.000000
10/8/2010	10:16:43 AM	PHl3 MFC set to  0.000000
10/8/2010	10:16:43 AM	SiCl4 MFC set to  0.000000
10/8/2010	10:16:43 AM	Bypass solenoid MFC set to  0.000000
10/8/2010	10:16:43 AM	Tube furnace set to 0
10/8/2010	10:17:43 AM	Helium valve closed
10/8/2010	10:17:43 AM	H2 valve closed
10/8/2010	10:17:43 AM	BCl3 valve closed
10/8/2010	10:17:43 AM	PH3 valve closed
10/8/2010	10:17:43 AM	SiCl4 pre valve closed
10/8/2010	10:17:43 AM	SiCl4 post valve closed
10/8/2010	10:17:43 AM	Bubbler valve closed
10/8/2010	10:17:43 AM	Main Vac valve opened
10/8/2010	10:17:43 AM	Bypass valve opened
10/8/2010	10:17:43 AM	Helium MFC set to  0.000000
10/8/2010	10:17:43 AM	H2 MFC set to  0.000000
10/8/2010	10:17:43 AM	BCl3 MFC set to  0.000000
10/8/2010	10:17:43 AM	PHl3 MFC set to  0.000000
10/8/2010	10:17:43 AM	SiCl4 MFC set to  0.000000
10/8/2010	10:17:43 AM	Bypass solenoid MFC set to  0.000000
10/8/2010	10:17:44 AM	Tube furnace set to 0
10/8/2010	10:18:44 AM	H2 valve closed
10/8/2010	10:18:44 AM	BCl3 valve closed
10/8/2010	10:18:44 AM	PH3 valve closed
10/8/2010	10:18:44 AM	SiCl4 pre valve closed
10/8/2010	10:18:44 AM	SiCl4 post valve closed
10/8/2010	10:18:44 AM	Bubbler valve closed
10/8/2010	10:18:44 AM	Helium valve opened
10/8/2010	10:18:44 AM	Main Vac valve opened
10/8/2010	10:18:44 AM	Bypass valve opened
10/8/2010	10:18:44 AM	Helium MFC set to  100.000000
10/8/2010	10:18:44 AM	H2 MFC set to  0.000000
10/8/2010	10:18:44 AM	BCl3 MFC set to  0.000000
10/8/2010	10:18:44 AM	PHl3 MFC set to  0.000000
10/8/2010	10:18:44 AM	SiCl4 MFC set to  0.000000
10/8/2010	10:18:44 AM	Bypass solenoid MFC set to  0.000000
10/8/2010	10:18:44 AM	Tube furnace set to 0
10/8/2010	10:19:44 AM	Helium valve closed
10/8/2010	10:19:44 AM	H2 valve closed
10/8/2010	10:19:44 AM	BCl3 valve closed
10/8/2010	10:19:44 AM	PH3 valve closed
10/8/2010	10:19:44 AM	SiCl4 pre valve closed
10/8/2010	10:19:44 AM	SiCl4 post valve closed
10/8/2010	10:19:44 AM	Bubbler valve closed
10/8/2010	10:19:44 AM	Main Vac valve opened
10/8/2010	10:19:44 AM	Bypass valve opened
10/8/2010	10:19:44 AM	Helium MFC set to  0.000000
10/8/2010	10:19:44 AM	H2 MFC set to  0.000000
10/8/2010	10:19:44 AM	BCl3 MFC set to  0.000000
10/8/2010	10:19:44 AM	PHl3 MFC set to  0.000000
10/8/2010	10:19:44 AM	SiCl4 MFC set to  0.000000
10/8/2010	10:19:44 AM	Bypass solenoid MFC set to  0.000000
10/8/2010	10:19:44 AM	Tube furnace set to 0
10/8/2010	10:20:44 AM	H2 valve closed
10/8/2010	10:20:44 AM	BCl3 valve closed
10/8/2010	10:20:44 AM	PH3 valve closed
10/8/2010	10:20:44 AM	SiCl4 pre valve closed
10/8/2010	10:20:44 AM	SiCl4 post valve closed
10/8/2010	10:20:44 AM	Bubbler valve closed
10/8/2010	10:20:44 AM	Helium valve opened
10/8/2010	10:20:44 AM	Main Vac valve opened
10/8/2010	10:20:44 AM	Bypass valve opened
10/8/2010	10:20:44 AM	Helium MFC set to  100.000000
10/8/2010	10:20:44 AM	H2 MFC set to  0.000000
10/8/2010	10:20:44 AM	BCl3 MFC set to  0.000000
10/8/2010	10:20:44 AM	PHl3 MFC set to  0.000000
10/8/2010	10:20:44 AM	SiCl4 MFC set to  0.000000
10/8/2010	10:20:44 AM	Bypass solenoid MFC set to  0.000000
10/8/2010	10:20:44 AM	Tube furnace set to 0
10/8/2010	10:21:44 AM	Helium valve closed
10/8/2010	10:21:44 AM	H2 valve closed
10/8/2010	10:21:44 AM	BCl3 valve closed
10/8/2010	10:21:44 AM	PH3 valve closed
10/8/2010	10:21:44 AM	SiCl4 pre valve closed
10/8/2010	10:21:44 AM	SiCl4 post valve closed
10/8/2010	10:21:44 AM	Bubbler valve closed
10/8/2010	10:21:44 AM	Main Vac valve opened
10/8/2010	10:21:44 AM	Bypass valve opened
10/8/2010	10:21:44 AM	Helium MFC set to  0.000000
10/8/2010	10:21:44 AM	H2 MFC set to  0.000000
10/8/2010	10:21:44 AM	BCl3 MFC set to  0.000000
10/8/2010	10:21:44 AM	PHl3 MFC set to  0.000000
10/8/2010	10:21:44 AM	SiCl4 MFC set to  0.000000
10/8/2010	10:21:44 AM	Bypass solenoid MFC set to  0.000000
10/8/2010	10:21:44 AM	Tube furnace set to 0
10/8/2010	10:22:44 AM	H2 valve closed
10/8/2010	10:22:44 AM	BCl3 valve closed
10/8/2010	10:22:44 AM	PH3 valve closed
10/8/2010	10:22:44 AM	SiCl4 pre valve closed
10/8/2010	10:22:44 AM	SiCl4 post valve closed
10/8/2010	10:22:44 AM	Bubbler valve closed
10/8/2010	10:22:44 AM	Helium valve opened
10/8/2010	10:22:44 AM	Main Vac valve opened
10/8/2010	10:22:44 AM	Bypass valve opened
10/8/2010	10:22:44 AM	Helium MFC set to  100.000000
10/8/2010	10:22:44 AM	H2 MFC set to  0.000000
10/8/2010	10:22:44 AM	BCl3 MFC set to  0.000000
10/8/2010	10:22:44 AM	PHl3 MFC set to  0.000000
10/8/2010	10:22:44 AM	SiCl4 MFC set to  0.000000
10/8/2010	10:22:44 AM	Bypass solenoid MFC set to  0.000000
10/8/2010	10:22:44 AM	Tube furnace set to 0
10/8/2010	10:23:45 AM	Helium valve closed
10/8/2010	10:23:45 AM	H2 valve closed
10/8/2010	10:23:45 AM	BCl3 valve closed
10/8/2010	10:23:45 AM	PH3 valve closed
10/8/2010	10:23:45 AM	SiCl4 pre valve closed
10/8/2010	10:23:45 AM	SiCl4 post valve closed
10/8/2010	10:23:45 AM	Bubbler valve closed
10/8/2010	10:23:45 AM	Main Vac valve opened
10/8/2010	10:23:45 AM	Bypass valve opened
10/8/2010	10:23:45 AM	Helium MFC set to  0.000000
10/8/2010	10:23:45 AM	H2 MFC set to  0.000000
10/8/2010	10:23:45 AM	BCl3 MFC set to  0.000000
10/8/2010	10:23:45 AM	PHl3 MFC set to  0.000000
10/8/2010	10:23:45 AM	SiCl4 MFC set to  0.000000
10/8/2010	10:23:45 AM	Bypass solenoid MFC set to  0.000000
10/8/2010	10:23:45 AM	Tube furnace set to 0
10/8/2010	10:23:46 AM	Run finished at 10:23 AM
10/8/2010	10:23:46 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/8/2010	10:28:56 AM	Helium MFC set to  100.000000
10/8/2010	10:28:58 AM	Helium valve opened
10/8/2010	10:29:46 AM	Helium MFC set to  0.000000
10/8/2010	10:29:47 AM	Helium valve closed
10/8/2010	10:30:43 AM	Main Vac valve closed
10/8/2010	10:30:45 AM	Bypass valve closed
10/8/2010	10:30:51 AM	Bypass valve opened
10/8/2010	10:30:54 AM	Main Vac valve opened
10/8/2010	10:32:22 AM	Recipe started at 10:32 AM
10/8/2010	10:32:22 AM	Helium valve closed
10/8/2010	10:32:22 AM	BCl3 valve closed
10/8/2010	10:32:22 AM	PH3 valve closed
10/8/2010	10:32:22 AM	SiCl4 pre valve closed
10/8/2010	10:32:22 AM	SiCl4 post valve closed
10/8/2010	10:32:22 AM	Main Vac valve closed
10/8/2010	10:32:22 AM	Bypass valve closed
10/8/2010	10:32:22 AM	Bubbler valve closed
10/8/2010	10:32:22 AM	H2 valve opened
10/8/2010	10:32:22 AM	Helium MFC set to  0.000000
10/8/2010	10:32:22 AM	H2 MFC set to  500.000000
10/8/2010	10:32:22 AM	BCl3 MFC set to  0.000000
10/8/2010	10:32:22 AM	PHl3 MFC set to  0.000000
10/8/2010	10:32:22 AM	SiCl4 MFC set to  0.000000
10/8/2010	10:32:22 AM	Bypass solenoid MFC set to  0.000000
10/8/2010	10:32:22 AM	Tube furnace set to 100
10/8/2010	10:33:44 AM	Helium valve closed
10/8/2010	10:33:44 AM	BCl3 valve closed
10/8/2010	10:33:44 AM	PH3 valve closed
10/8/2010	10:33:44 AM	SiCl4 pre valve closed
10/8/2010	10:33:44 AM	SiCl4 post valve closed
10/8/2010	10:33:44 AM	Main Vac valve closed
10/8/2010	10:33:44 AM	Bypass valve closed
10/8/2010	10:33:44 AM	H2 valve opened
10/8/2010	10:33:44 AM	Bubbler valve opened
10/8/2010	10:33:44 AM	Helium MFC set to  0.000000
10/8/2010	10:33:44 AM	H2 MFC set to  500.000000
10/8/2010	10:33:44 AM	BCl3 MFC set to  0.000000
10/8/2010	10:33:44 AM	PHl3 MFC set to  0.000000
10/8/2010	10:33:44 AM	SiCl4 MFC set to  0.000000
10/8/2010	10:33:44 AM	Bypass solenoid MFC set to  0.000000
10/8/2010	10:33:44 AM	Tube furnace set to 1000
10/8/2010	10:53:44 AM	Helium valve closed
10/8/2010	10:53:44 AM	PH3 valve closed
10/8/2010	10:53:44 AM	Main Vac valve closed
10/8/2010	10:53:44 AM	Bypass valve closed
10/8/2010	10:53:44 AM	H2 valve opened
10/8/2010	10:53:44 AM	BCl3 valve opened
10/8/2010	10:53:44 AM	SiCl4 pre valve opened
10/8/2010	10:53:44 AM	SiCl4 post valve opened
10/8/2010	10:53:44 AM	Bubbler valve opened
10/8/2010	10:53:44 AM	Helium MFC set to  0.000000
10/8/2010	10:53:44 AM	H2 MFC set to  450.000000
10/8/2010	10:53:44 AM	BCl3 MFC set to  12.000000
10/8/2010	10:53:44 AM	PHl3 MFC set to  0.000000
10/8/2010	10:53:44 AM	SiCl4 MFC set to  50.000000
10/8/2010	10:53:44 AM	Bypass solenoid MFC set to  0.000000
10/8/2010	10:53:44 AM	Tube furnace set to 1000
10/8/2010	11:06:44 AM	H2 valve closed
10/8/2010	11:06:44 AM	BCl3 valve closed
10/8/2010	11:06:44 AM	PH3 valve closed
10/8/2010	11:06:44 AM	SiCl4 pre valve closed
10/8/2010	11:06:44 AM	SiCl4 post valve closed
10/8/2010	11:06:44 AM	Main Vac valve closed
10/8/2010	11:06:44 AM	Bypass valve closed
10/8/2010	11:06:44 AM	Helium valve opened
10/8/2010	11:06:44 AM	Bubbler valve opened
10/8/2010	11:06:44 AM	Helium MFC set to  500.000000
10/8/2010	11:06:44 AM	H2 MFC set to  0.000000
10/8/2010	11:06:44 AM	BCl3 MFC set to  0.000000
10/8/2010	11:06:44 AM	PHl3 MFC set to  0.000000
10/8/2010	11:06:44 AM	SiCl4 MFC set to  0.000000
10/8/2010	11:06:44 AM	Bypass solenoid MFC set to  0.000000
10/8/2010	11:06:44 AM	Tube furnace set to 0
10/8/2010	11:26:44 AM	Helium valve closed
10/8/2010	11:26:44 AM	H2 valve closed
10/8/2010	11:26:44 AM	BCl3 valve closed
10/8/2010	11:26:44 AM	PH3 valve closed
10/8/2010	11:26:44 AM	SiCl4 pre valve closed
10/8/2010	11:26:44 AM	SiCl4 post valve closed
10/8/2010	11:26:44 AM	Main Vac valve closed
10/8/2010	11:26:44 AM	Bypass valve closed
10/8/2010	11:26:44 AM	Bubbler valve closed
10/8/2010	11:26:44 AM	Helium MFC set to  0.000000
10/8/2010	11:26:44 AM	H2 MFC set to  0.000000
10/8/2010	11:26:44 AM	BCl3 MFC set to  0.000000
10/8/2010	11:26:44 AM	PHl3 MFC set to  0.000000
10/8/2010	11:26:44 AM	SiCl4 MFC set to  0.000000
10/8/2010	11:26:44 AM	Bypass solenoid MFC set to  0.000000
10/8/2010	11:26:45 AM	Tube furnace set to 0
10/8/2010	11:26:45 AM	Run finished at 11:26 AM
10/8/2010	11:30:48 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/8/2010	11:30:59 AM	Recipe started at 11:30 AM
10/8/2010	11:30:59 AM	Helium valve closed
10/8/2010	11:30:59 AM	H2 valve closed
10/8/2010	11:30:59 AM	BCl3 valve closed
10/8/2010	11:30:59 AM	PH3 valve closed
10/8/2010	11:30:59 AM	SiCl4 pre valve closed
10/8/2010	11:30:59 AM	SiCl4 post valve closed
10/8/2010	11:30:59 AM	Main Vac valve closed
10/8/2010	11:30:59 AM	Bubbler valve closed
10/8/2010	11:30:59 AM	Bypass valve opened
10/8/2010	11:30:59 AM	Helium MFC set to  0.000000
10/8/2010	11:30:59 AM	H2 MFC set to  0.000000
10/8/2010	11:30:59 AM	BCl3 MFC set to  0.000000
10/8/2010	11:30:59 AM	PHl3 MFC set to  0.000000
10/8/2010	11:30:59 AM	SiCl4 MFC set to  0.000000
10/8/2010	11:30:59 AM	Bypass solenoid MFC set to  0.000000
10/8/2010	11:30:59 AM	Tube furnace set to 0
10/8/2010	11:31:47 AM	Helium valve closed
10/8/2010	11:31:47 AM	H2 valve closed
10/8/2010	11:31:47 AM	BCl3 valve closed
10/8/2010	11:31:47 AM	PH3 valve closed
10/8/2010	11:31:47 AM	SiCl4 pre valve closed
10/8/2010	11:31:47 AM	SiCl4 post valve closed
10/8/2010	11:31:47 AM	Bubbler valve closed
10/8/2010	11:31:47 AM	Main Vac valve opened
10/8/2010	11:31:47 AM	Bypass valve opened
10/8/2010	11:31:47 AM	Helium MFC set to  0.000000
10/8/2010	11:31:47 AM	H2 MFC set to  0.000000
10/8/2010	11:31:47 AM	BCl3 MFC set to  0.000000
10/8/2010	11:31:47 AM	PHl3 MFC set to  0.000000
10/8/2010	11:31:47 AM	SiCl4 MFC set to  0.000000
10/8/2010	11:31:47 AM	Bypass solenoid MFC set to  0.000000
10/8/2010	11:31:48 AM	Tube furnace set to 0
10/8/2010	11:32:48 AM	H2 valve closed
10/8/2010	11:32:48 AM	BCl3 valve closed
10/8/2010	11:32:48 AM	PH3 valve closed
10/8/2010	11:32:48 AM	SiCl4 pre valve closed
10/8/2010	11:32:48 AM	SiCl4 post valve closed
10/8/2010	11:32:48 AM	Bubbler valve closed
10/8/2010	11:32:48 AM	Helium valve opened
10/8/2010	11:32:48 AM	Main Vac valve opened
10/8/2010	11:32:48 AM	Bypass valve opened
10/8/2010	11:32:48 AM	Helium MFC set to  100.000000
10/8/2010	11:32:48 AM	H2 MFC set to  0.000000
10/8/2010	11:32:48 AM	BCl3 MFC set to  0.000000
10/8/2010	11:32:48 AM	PHl3 MFC set to  0.000000
10/8/2010	11:32:48 AM	SiCl4 MFC set to  0.000000
10/8/2010	11:32:48 AM	Bypass solenoid MFC set to  0.000000
10/8/2010	11:32:48 AM	Tube furnace set to 0
10/8/2010	11:33:48 AM	Helium valve closed
10/8/2010	11:33:48 AM	H2 valve closed
10/8/2010	11:33:48 AM	BCl3 valve closed
10/8/2010	11:33:48 AM	PH3 valve closed
10/8/2010	11:33:48 AM	SiCl4 pre valve closed
10/8/2010	11:33:48 AM	SiCl4 post valve closed
10/8/2010	11:33:48 AM	Bubbler valve closed
10/8/2010	11:33:48 AM	Main Vac valve opened
10/8/2010	11:33:48 AM	Bypass valve opened
10/8/2010	11:33:48 AM	Helium MFC set to  0.000000
10/8/2010	11:33:48 AM	H2 MFC set to  0.000000
10/8/2010	11:33:48 AM	BCl3 MFC set to  0.000000
10/8/2010	11:33:48 AM	PHl3 MFC set to  0.000000
10/8/2010	11:33:48 AM	SiCl4 MFC set to  0.000000
10/8/2010	11:33:48 AM	Bypass solenoid MFC set to  0.000000
10/8/2010	11:33:48 AM	Tube furnace set to 0
10/8/2010	11:34:48 AM	H2 valve closed
10/8/2010	11:34:48 AM	BCl3 valve closed
10/8/2010	11:34:48 AM	PH3 valve closed
10/8/2010	11:34:48 AM	SiCl4 pre valve closed
10/8/2010	11:34:48 AM	SiCl4 post valve closed
10/8/2010	11:34:48 AM	Bubbler valve closed
10/8/2010	11:34:48 AM	Helium valve opened
10/8/2010	11:34:48 AM	Main Vac valve opened
10/8/2010	11:34:48 AM	Bypass valve opened
10/8/2010	11:34:48 AM	Helium MFC set to  100.000000
10/8/2010	11:34:48 AM	H2 MFC set to  0.000000
10/8/2010	11:34:48 AM	BCl3 MFC set to  0.000000
10/8/2010	11:34:48 AM	PHl3 MFC set to  0.000000
10/8/2010	11:34:48 AM	SiCl4 MFC set to  0.000000
10/8/2010	11:34:48 AM	Bypass solenoid MFC set to  0.000000
10/8/2010	11:34:48 AM	Tube furnace set to 0
10/8/2010	11:35:48 AM	Helium valve closed
10/8/2010	11:35:48 AM	H2 valve closed
10/8/2010	11:35:48 AM	BCl3 valve closed
10/8/2010	11:35:48 AM	PH3 valve closed
10/8/2010	11:35:48 AM	SiCl4 pre valve closed
10/8/2010	11:35:48 AM	SiCl4 post valve closed
10/8/2010	11:35:48 AM	Bubbler valve closed
10/8/2010	11:35:48 AM	Main Vac valve opened
10/8/2010	11:35:48 AM	Bypass valve opened
10/8/2010	11:35:48 AM	Helium MFC set to  0.000000
10/8/2010	11:35:48 AM	H2 MFC set to  0.000000
10/8/2010	11:35:48 AM	BCl3 MFC set to  0.000000
10/8/2010	11:35:48 AM	PHl3 MFC set to  0.000000
10/8/2010	11:35:48 AM	SiCl4 MFC set to  0.000000
10/8/2010	11:35:48 AM	Bypass solenoid MFC set to  0.000000
10/8/2010	11:35:48 AM	Tube furnace set to 0
10/8/2010	11:36:48 AM	H2 valve closed
10/8/2010	11:36:48 AM	BCl3 valve closed
10/8/2010	11:36:48 AM	PH3 valve closed
10/8/2010	11:36:48 AM	SiCl4 pre valve closed
10/8/2010	11:36:48 AM	SiCl4 post valve closed
10/8/2010	11:36:48 AM	Bubbler valve closed
10/8/2010	11:36:48 AM	Helium valve opened
10/8/2010	11:36:48 AM	Main Vac valve opened
10/8/2010	11:36:48 AM	Bypass valve opened
10/8/2010	11:36:48 AM	Helium MFC set to  100.000000
10/8/2010	11:36:48 AM	H2 MFC set to  0.000000
10/8/2010	11:36:48 AM	BCl3 MFC set to  0.000000
10/8/2010	11:36:48 AM	PHl3 MFC set to  0.000000
10/8/2010	11:36:48 AM	SiCl4 MFC set to  0.000000
10/8/2010	11:36:48 AM	Bypass solenoid MFC set to  0.000000
10/8/2010	11:36:49 AM	Tube furnace set to 0
10/8/2010	11:37:49 AM	Helium valve closed
10/8/2010	11:37:49 AM	H2 valve closed
10/8/2010	11:37:49 AM	BCl3 valve closed
10/8/2010	11:37:49 AM	PH3 valve closed
10/8/2010	11:37:49 AM	SiCl4 pre valve closed
10/8/2010	11:37:49 AM	SiCl4 post valve closed
10/8/2010	11:37:49 AM	Bubbler valve closed
10/8/2010	11:37:49 AM	Main Vac valve opened
10/8/2010	11:37:49 AM	Bypass valve opened
10/8/2010	11:37:49 AM	Helium MFC set to  0.000000
10/8/2010	11:37:49 AM	H2 MFC set to  0.000000
10/8/2010	11:37:49 AM	BCl3 MFC set to  0.000000
10/8/2010	11:37:49 AM	PHl3 MFC set to  0.000000
10/8/2010	11:37:49 AM	SiCl4 MFC set to  0.000000
10/8/2010	11:37:49 AM	Bypass solenoid MFC set to  0.000000
10/8/2010	11:37:49 AM	Tube furnace set to 0
10/8/2010	11:38:49 AM	H2 valve closed
10/8/2010	11:38:49 AM	BCl3 valve closed
10/8/2010	11:38:49 AM	PH3 valve closed
10/8/2010	11:38:49 AM	SiCl4 pre valve closed
10/8/2010	11:38:49 AM	SiCl4 post valve closed
10/8/2010	11:38:49 AM	Bubbler valve closed
10/8/2010	11:38:49 AM	Helium valve opened
10/8/2010	11:38:49 AM	Main Vac valve opened
10/8/2010	11:38:49 AM	Bypass valve opened
10/8/2010	11:38:49 AM	Helium MFC set to  100.000000
10/8/2010	11:38:49 AM	H2 MFC set to  0.000000
10/8/2010	11:38:49 AM	BCl3 MFC set to  0.000000
10/8/2010	11:38:49 AM	PHl3 MFC set to  0.000000
10/8/2010	11:38:49 AM	SiCl4 MFC set to  0.000000
10/8/2010	11:38:49 AM	Bypass solenoid MFC set to  0.000000
10/8/2010	11:38:49 AM	Tube furnace set to 0
10/8/2010	11:39:49 AM	Helium valve closed
10/8/2010	11:39:49 AM	H2 valve closed
10/8/2010	11:39:49 AM	BCl3 valve closed
10/8/2010	11:39:49 AM	PH3 valve closed
10/8/2010	11:39:49 AM	SiCl4 pre valve closed
10/8/2010	11:39:49 AM	SiCl4 post valve closed
10/8/2010	11:39:49 AM	Bubbler valve closed
10/8/2010	11:39:49 AM	Main Vac valve opened
10/8/2010	11:39:49 AM	Bypass valve opened
10/8/2010	11:39:49 AM	Helium MFC set to  0.000000
10/8/2010	11:39:49 AM	H2 MFC set to  0.000000
10/8/2010	11:39:49 AM	BCl3 MFC set to  0.000000
10/8/2010	11:39:49 AM	PHl3 MFC set to  0.000000
10/8/2010	11:39:49 AM	SiCl4 MFC set to  0.000000
10/8/2010	11:39:49 AM	Bypass solenoid MFC set to  0.000000
10/8/2010	11:39:49 AM	Tube furnace set to 0
10/8/2010	11:40:49 AM	H2 valve closed
10/8/2010	11:40:49 AM	BCl3 valve closed
10/8/2010	11:40:49 AM	PH3 valve closed
10/8/2010	11:40:49 AM	SiCl4 pre valve closed
10/8/2010	11:40:49 AM	SiCl4 post valve closed
10/8/2010	11:40:49 AM	Bubbler valve closed
10/8/2010	11:40:49 AM	Helium valve opened
10/8/2010	11:40:49 AM	Main Vac valve opened
10/8/2010	11:40:49 AM	Bypass valve opened
10/8/2010	11:40:49 AM	Helium MFC set to  100.000000
10/8/2010	11:40:49 AM	H2 MFC set to  0.000000
10/8/2010	11:40:49 AM	BCl3 MFC set to  0.000000
10/8/2010	11:40:49 AM	PHl3 MFC set to  0.000000
10/8/2010	11:40:49 AM	SiCl4 MFC set to  0.000000
10/8/2010	11:40:49 AM	Bypass solenoid MFC set to  0.000000
10/8/2010	11:40:49 AM	Tube furnace set to 0
10/8/2010	11:41:49 AM	Helium valve closed
10/8/2010	11:41:49 AM	H2 valve closed
10/8/2010	11:41:49 AM	BCl3 valve closed
10/8/2010	11:41:49 AM	PH3 valve closed
10/8/2010	11:41:49 AM	SiCl4 pre valve closed
10/8/2010	11:41:49 AM	SiCl4 post valve closed
10/8/2010	11:41:49 AM	Bubbler valve closed
10/8/2010	11:41:49 AM	Main Vac valve opened
10/8/2010	11:41:49 AM	Bypass valve opened
10/8/2010	11:41:49 AM	Helium MFC set to  0.000000
10/8/2010	11:41:49 AM	H2 MFC set to  0.000000
10/8/2010	11:41:49 AM	BCl3 MFC set to  0.000000
10/8/2010	11:41:49 AM	PHl3 MFC set to  0.000000
10/8/2010	11:41:49 AM	SiCl4 MFC set to  0.000000
10/8/2010	11:41:49 AM	Bypass solenoid MFC set to  0.000000
10/8/2010	11:41:50 AM	Tube furnace set to 0
10/8/2010	11:42:50 AM	H2 valve closed
10/8/2010	11:42:50 AM	BCl3 valve closed
10/8/2010	11:42:50 AM	PH3 valve closed
10/8/2010	11:42:50 AM	SiCl4 pre valve closed
10/8/2010	11:42:50 AM	SiCl4 post valve closed
10/8/2010	11:42:50 AM	Bubbler valve closed
10/8/2010	11:42:50 AM	Helium valve opened
10/8/2010	11:42:50 AM	Main Vac valve opened
10/8/2010	11:42:50 AM	Bypass valve opened
10/8/2010	11:42:50 AM	Helium MFC set to  100.000000
10/8/2010	11:42:50 AM	H2 MFC set to  0.000000
10/8/2010	11:42:50 AM	BCl3 MFC set to  0.000000
10/8/2010	11:42:50 AM	PHl3 MFC set to  0.000000
10/8/2010	11:42:50 AM	SiCl4 MFC set to  0.000000
10/8/2010	11:42:50 AM	Bypass solenoid MFC set to  0.000000
10/8/2010	11:42:50 AM	Tube furnace set to 0
10/8/2010	11:43:50 AM	Helium valve closed
10/8/2010	11:43:50 AM	H2 valve closed
10/8/2010	11:43:50 AM	BCl3 valve closed
10/8/2010	11:43:50 AM	PH3 valve closed
10/8/2010	11:43:50 AM	SiCl4 pre valve closed
10/8/2010	11:43:50 AM	SiCl4 post valve closed
10/8/2010	11:43:50 AM	Bubbler valve closed
10/8/2010	11:43:50 AM	Main Vac valve opened
10/8/2010	11:43:50 AM	Bypass valve opened
10/8/2010	11:43:50 AM	Helium MFC set to  0.000000
10/8/2010	11:43:50 AM	H2 MFC set to  0.000000
10/8/2010	11:43:50 AM	BCl3 MFC set to  0.000000
10/8/2010	11:43:50 AM	PHl3 MFC set to  0.000000
10/8/2010	11:43:50 AM	SiCl4 MFC set to  0.000000
10/8/2010	11:43:50 AM	Bypass solenoid MFC set to  0.000000
10/8/2010	11:43:50 AM	Tube furnace set to 0
10/8/2010	11:44:50 AM	H2 valve closed
10/8/2010	11:44:50 AM	BCl3 valve closed
10/8/2010	11:44:50 AM	PH3 valve closed
10/8/2010	11:44:50 AM	SiCl4 pre valve closed
10/8/2010	11:44:50 AM	SiCl4 post valve closed
10/8/2010	11:44:50 AM	Bubbler valve closed
10/8/2010	11:44:50 AM	Helium valve opened
10/8/2010	11:44:50 AM	Main Vac valve opened
10/8/2010	11:44:50 AM	Bypass valve opened
10/8/2010	11:44:50 AM	Helium MFC set to  100.000000
10/8/2010	11:44:50 AM	H2 MFC set to  0.000000
10/8/2010	11:44:50 AM	BCl3 MFC set to  0.000000
10/8/2010	11:44:50 AM	PHl3 MFC set to  0.000000
10/8/2010	11:44:50 AM	SiCl4 MFC set to  0.000000
10/8/2010	11:44:50 AM	Bypass solenoid MFC set to  0.000000
10/8/2010	11:44:50 AM	Tube furnace set to 0
10/8/2010	11:45:50 AM	Helium valve closed
10/8/2010	11:45:50 AM	H2 valve closed
10/8/2010	11:45:50 AM	BCl3 valve closed
10/8/2010	11:45:50 AM	PH3 valve closed
10/8/2010	11:45:50 AM	SiCl4 pre valve closed
10/8/2010	11:45:50 AM	SiCl4 post valve closed
10/8/2010	11:45:50 AM	Bubbler valve closed
10/8/2010	11:45:50 AM	Main Vac valve opened
10/8/2010	11:45:50 AM	Bypass valve opened
10/8/2010	11:45:50 AM	Helium MFC set to  0.000000
10/8/2010	11:45:50 AM	H2 MFC set to  0.000000
10/8/2010	11:45:50 AM	BCl3 MFC set to  0.000000
10/8/2010	11:45:50 AM	PHl3 MFC set to  0.000000
10/8/2010	11:45:50 AM	SiCl4 MFC set to  0.000000
10/8/2010	11:45:50 AM	Bypass solenoid MFC set to  0.000000
10/8/2010	11:45:50 AM	Tube furnace set to 0
10/8/2010	11:46:50 AM	H2 valve closed
10/8/2010	11:46:50 AM	BCl3 valve closed
10/8/2010	11:46:50 AM	PH3 valve closed
10/8/2010	11:46:50 AM	SiCl4 pre valve closed
10/8/2010	11:46:50 AM	SiCl4 post valve closed
10/8/2010	11:46:50 AM	Bubbler valve closed
10/8/2010	11:46:50 AM	Helium valve opened
10/8/2010	11:46:50 AM	Main Vac valve opened
10/8/2010	11:46:50 AM	Bypass valve opened
10/8/2010	11:46:50 AM	Helium MFC set to  100.000000
10/8/2010	11:46:50 AM	H2 MFC set to  0.000000
10/8/2010	11:46:50 AM	BCl3 MFC set to  0.000000
10/8/2010	11:46:50 AM	PHl3 MFC set to  0.000000
10/8/2010	11:46:50 AM	SiCl4 MFC set to  0.000000
10/8/2010	11:46:50 AM	Bypass solenoid MFC set to  0.000000
10/8/2010	11:46:51 AM	Tube furnace set to 0
10/8/2010	11:47:51 AM	Helium valve closed
10/8/2010	11:47:51 AM	H2 valve closed
10/8/2010	11:47:51 AM	BCl3 valve closed
10/8/2010	11:47:51 AM	PH3 valve closed
10/8/2010	11:47:51 AM	SiCl4 pre valve closed
10/8/2010	11:47:51 AM	SiCl4 post valve closed
10/8/2010	11:47:51 AM	Bubbler valve closed
10/8/2010	11:47:51 AM	Main Vac valve opened
10/8/2010	11:47:51 AM	Bypass valve opened
10/8/2010	11:47:51 AM	Helium MFC set to  0.000000
10/8/2010	11:47:51 AM	H2 MFC set to  0.000000
10/8/2010	11:47:51 AM	BCl3 MFC set to  0.000000
10/8/2010	11:47:51 AM	PHl3 MFC set to  0.000000
10/8/2010	11:47:51 AM	SiCl4 MFC set to  0.000000
10/8/2010	11:47:51 AM	Bypass solenoid MFC set to  0.000000
10/8/2010	11:47:51 AM	Tube furnace set to 0
10/8/2010	11:48:51 AM	H2 valve closed
10/8/2010	11:48:51 AM	BCl3 valve closed
10/8/2010	11:48:51 AM	PH3 valve closed
10/8/2010	11:48:51 AM	SiCl4 pre valve closed
10/8/2010	11:48:51 AM	SiCl4 post valve closed
10/8/2010	11:48:51 AM	Bubbler valve closed
10/8/2010	11:48:51 AM	Helium valve opened
10/8/2010	11:48:51 AM	Main Vac valve opened
10/8/2010	11:48:51 AM	Bypass valve opened
10/8/2010	11:48:51 AM	Helium MFC set to  100.000000
10/8/2010	11:48:51 AM	H2 MFC set to  0.000000
10/8/2010	11:48:51 AM	BCl3 MFC set to  0.000000
10/8/2010	11:48:51 AM	PHl3 MFC set to  0.000000
10/8/2010	11:48:51 AM	SiCl4 MFC set to  0.000000
10/8/2010	11:48:51 AM	Bypass solenoid MFC set to  0.000000
10/8/2010	11:48:51 AM	Tube furnace set to 0
10/8/2010	11:49:51 AM	Helium valve closed
10/8/2010	11:49:51 AM	H2 valve closed
10/8/2010	11:49:51 AM	BCl3 valve closed
10/8/2010	11:49:51 AM	PH3 valve closed
10/8/2010	11:49:51 AM	SiCl4 pre valve closed
10/8/2010	11:49:51 AM	SiCl4 post valve closed
10/8/2010	11:49:51 AM	Bubbler valve closed
10/8/2010	11:49:51 AM	Main Vac valve opened
10/8/2010	11:49:51 AM	Bypass valve opened
10/8/2010	11:49:51 AM	Helium MFC set to  0.000000
10/8/2010	11:49:51 AM	H2 MFC set to  0.000000
10/8/2010	11:49:51 AM	BCl3 MFC set to  0.000000
10/8/2010	11:49:51 AM	PHl3 MFC set to  0.000000
10/8/2010	11:49:51 AM	SiCl4 MFC set to  0.000000
10/8/2010	11:49:51 AM	Bypass solenoid MFC set to  0.000000
10/8/2010	11:49:51 AM	Tube furnace set to 0
10/8/2010	11:50:31 AM	H2 valve closed
10/8/2010	11:50:31 AM	BCl3 valve closed
10/8/2010	11:50:31 AM	PH3 valve closed
10/8/2010	11:50:31 AM	SiCl4 pre valve closed
10/8/2010	11:50:31 AM	SiCl4 post valve closed
10/8/2010	11:50:31 AM	Bubbler valve closed
10/8/2010	11:50:31 AM	Helium valve opened
10/8/2010	11:50:31 AM	Main Vac valve opened
10/8/2010	11:50:31 AM	Bypass valve opened
10/8/2010	11:50:31 AM	Helium MFC set to  100.000000
10/8/2010	11:50:31 AM	H2 MFC set to  0.000000
10/8/2010	11:50:31 AM	BCl3 MFC set to  0.000000
10/8/2010	11:50:31 AM	PHl3 MFC set to  0.000000
10/8/2010	11:50:31 AM	SiCl4 MFC set to  0.000000
10/8/2010	11:50:31 AM	Bypass solenoid MFC set to  0.000000
10/8/2010	11:50:31 AM	Tube furnace set to 0
10/8/2010	11:51:31 AM	Helium valve closed
10/8/2010	11:51:31 AM	H2 valve closed
10/8/2010	11:51:31 AM	BCl3 valve closed
10/8/2010	11:51:31 AM	PH3 valve closed
10/8/2010	11:51:31 AM	SiCl4 pre valve closed
10/8/2010	11:51:31 AM	SiCl4 post valve closed
10/8/2010	11:51:31 AM	Bubbler valve closed
10/8/2010	11:51:31 AM	Main Vac valve opened
10/8/2010	11:51:31 AM	Bypass valve opened
10/8/2010	11:51:31 AM	Helium MFC set to  0.000000
10/8/2010	11:51:31 AM	H2 MFC set to  0.000000
10/8/2010	11:51:31 AM	BCl3 MFC set to  0.000000
10/8/2010	11:51:31 AM	PHl3 MFC set to  0.000000
10/8/2010	11:51:31 AM	SiCl4 MFC set to  0.000000
10/8/2010	11:51:31 AM	Bypass solenoid MFC set to  0.000000
10/8/2010	11:51:31 AM	Tube furnace set to 0
10/8/2010	11:51:32 AM	Run finished at 11:51 AM
10/8/2010	11:51:32 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/8/2010	11:53:07 AM	Helium MFC set to  50.000000
10/8/2010	11:53:08 AM	Helium valve opened
10/8/2010	11:54:03 AM	Helium MFC set to  0.000000
10/8/2010	11:54:03 AM	Helium valve closed
10/8/2010	11:55:08 AM	Main Vac valve closed
10/8/2010	11:55:10 AM	Bypass valve closed
10/8/2010	11:55:20 AM	Bypass valve opened
10/8/2010	11:55:22 AM	Main Vac valve opened
10/8/2010	11:55:22 AM	Main Vac valve closed
10/8/2010	11:55:23 AM	Main Vac valve opened
10/8/2010	11:56:49 AM	Recipe started at 11:56 AM
10/8/2010	11:56:49 AM	Helium valve closed
10/8/2010	11:56:49 AM	BCl3 valve closed
10/8/2010	11:56:49 AM	PH3 valve closed
10/8/2010	11:56:49 AM	SiCl4 pre valve closed
10/8/2010	11:56:49 AM	SiCl4 post valve closed
10/8/2010	11:56:49 AM	Main Vac valve closed
10/8/2010	11:56:49 AM	Bypass valve closed
10/8/2010	11:56:49 AM	Bubbler valve closed
10/8/2010	11:56:49 AM	H2 valve opened
10/8/2010	11:56:49 AM	Helium MFC set to  0.000000
10/8/2010	11:56:49 AM	H2 MFC set to  500.000000
10/8/2010	11:56:49 AM	BCl3 MFC set to  0.000000
10/8/2010	11:56:49 AM	PHl3 MFC set to  0.000000
10/8/2010	11:56:49 AM	SiCl4 MFC set to  0.000000
10/8/2010	11:56:49 AM	Bypass solenoid MFC set to  0.000000
10/8/2010	11:56:49 AM	Tube furnace set to 100
10/8/2010	11:58:10 AM	Helium valve closed
10/8/2010	11:58:10 AM	BCl3 valve closed
10/8/2010	11:58:10 AM	PH3 valve closed
10/8/2010	11:58:10 AM	SiCl4 pre valve closed
10/8/2010	11:58:10 AM	SiCl4 post valve closed
10/8/2010	11:58:10 AM	Main Vac valve closed
10/8/2010	11:58:10 AM	Bypass valve closed
10/8/2010	11:58:10 AM	H2 valve opened
10/8/2010	11:58:10 AM	Bubbler valve opened
10/8/2010	11:58:10 AM	Helium MFC set to  0.000000
10/8/2010	11:58:10 AM	H2 MFC set to  500.000000
10/8/2010	11:58:10 AM	BCl3 MFC set to  0.000000
10/8/2010	11:58:10 AM	PHl3 MFC set to  0.000000
10/8/2010	11:58:10 AM	SiCl4 MFC set to  0.000000
10/8/2010	11:58:10 AM	Bypass solenoid MFC set to  0.000000
10/8/2010	11:58:10 AM	Tube furnace set to 1000
10/8/2010	12:18:10 PM	Helium valve closed
10/8/2010	12:18:10 PM	PH3 valve closed
10/8/2010	12:18:10 PM	Main Vac valve closed
10/8/2010	12:18:10 PM	Bypass valve closed
10/8/2010	12:18:10 PM	H2 valve opened
10/8/2010	12:18:10 PM	BCl3 valve opened
10/8/2010	12:18:10 PM	SiCl4 pre valve opened
10/8/2010	12:18:10 PM	SiCl4 post valve opened
10/8/2010	12:18:10 PM	Bubbler valve opened
10/8/2010	12:18:10 PM	Helium MFC set to  0.000000
10/8/2010	12:18:10 PM	H2 MFC set to  450.000000
10/8/2010	12:18:10 PM	BCl3 MFC set to  12.000000
10/8/2010	12:18:10 PM	PHl3 MFC set to  0.000000
10/8/2010	12:18:10 PM	SiCl4 MFC set to  50.000000
10/8/2010	12:18:10 PM	Bypass solenoid MFC set to  0.000000
10/8/2010	12:18:10 PM	Tube furnace set to 1000
10/8/2010	12:33:10 PM	H2 valve closed
10/8/2010	12:33:10 PM	BCl3 valve closed
10/8/2010	12:33:10 PM	PH3 valve closed
10/8/2010	12:33:10 PM	SiCl4 pre valve closed
10/8/2010	12:33:10 PM	SiCl4 post valve closed
10/8/2010	12:33:10 PM	Main Vac valve closed
10/8/2010	12:33:10 PM	Bypass valve closed
10/8/2010	12:33:10 PM	Helium valve opened
10/8/2010	12:33:10 PM	Bubbler valve opened
10/8/2010	12:33:10 PM	Helium MFC set to  500.000000
10/8/2010	12:33:10 PM	H2 MFC set to  0.000000
10/8/2010	12:33:10 PM	BCl3 MFC set to  0.000000
10/8/2010	12:33:10 PM	PHl3 MFC set to  0.000000
10/8/2010	12:33:10 PM	SiCl4 MFC set to  0.000000
10/8/2010	12:33:10 PM	Bypass solenoid MFC set to  0.000000
10/8/2010	12:33:11 PM	Tube furnace set to 0
10/8/2010	12:53:11 PM	Helium valve closed
10/8/2010	12:53:11 PM	H2 valve closed
10/8/2010	12:53:11 PM	BCl3 valve closed
10/8/2010	12:53:11 PM	PH3 valve closed
10/8/2010	12:53:11 PM	SiCl4 pre valve closed
10/8/2010	12:53:11 PM	SiCl4 post valve closed
10/8/2010	12:53:11 PM	Main Vac valve closed
10/8/2010	12:53:11 PM	Bypass valve closed
10/8/2010	12:53:11 PM	Bubbler valve closed
10/8/2010	12:53:11 PM	Helium MFC set to  0.000000
10/8/2010	12:53:11 PM	H2 MFC set to  0.000000
10/8/2010	12:53:11 PM	BCl3 MFC set to  0.000000
10/8/2010	12:53:11 PM	PHl3 MFC set to  0.000000
10/8/2010	12:53:11 PM	SiCl4 MFC set to  0.000000
10/8/2010	12:53:11 PM	Bypass solenoid MFC set to  0.000000
10/8/2010	12:53:11 PM	Tube furnace set to 0
10/8/2010	12:53:11 PM	Run finished at 12:53 PM
10/8/2010	1:16:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/8/2010	1:16:21 PM	Recipe started at 1:16 PM
10/8/2010	1:16:21 PM	H2 valve closed
10/8/2010	1:16:21 PM	BCl3 valve closed
10/8/2010	1:16:21 PM	PH3 valve closed
10/8/2010	1:16:21 PM	SiCl4 pre valve closed
10/8/2010	1:16:21 PM	SiCl4 post valve closed
10/8/2010	1:16:21 PM	Main Vac valve closed
10/8/2010	1:16:21 PM	Bypass valve closed
10/8/2010	1:16:21 PM	Bubbler valve closed
10/8/2010	1:16:21 PM	Helium valve opened
10/8/2010	1:16:21 PM	Helium MFC set to  500.000000
10/8/2010	1:16:21 PM	H2 MFC set to  0.000000
10/8/2010	1:16:21 PM	BCl3 MFC set to  0.000000
10/8/2010	1:16:21 PM	PHl3 MFC set to  0.000000
10/8/2010	1:16:21 PM	SiCl4 MFC set to  0.000000
10/8/2010	1:16:21 PM	Bypass solenoid MFC set to  0.000000
10/8/2010	1:16:21 PM	Tube furnace set to 0
10/8/2010	1:16:22 PM	Helium valve closed
10/8/2010	1:16:22 PM	H2 valve closed
10/8/2010	1:16:22 PM	BCl3 valve closed
10/8/2010	1:16:22 PM	PH3 valve closed
10/8/2010	1:16:22 PM	SiCl4 pre valve closed
10/8/2010	1:16:22 PM	SiCl4 post valve closed
10/8/2010	1:16:22 PM	Main Vac valve closed
10/8/2010	1:16:22 PM	Bypass valve closed
10/8/2010	1:16:22 PM	Bubbler valve closed
10/8/2010	1:16:22 PM	Helium MFC set to  0.000000
10/8/2010	1:16:22 PM	H2 MFC set to  0.000000
10/8/2010	1:16:22 PM	BCl3 MFC set to  0.000000
10/8/2010	1:16:22 PM	PHl3 MFC set to  0.000000
10/8/2010	1:16:22 PM	SiCl4 MFC set to  0.000000
10/8/2010	1:16:22 PM	Bypass solenoid MFC set to  0.000000
10/8/2010	1:16:22 PM	Tube furnace set to 0
10/8/2010	1:16:23 PM	Run finished at 1:16 PM
10/8/2010	1:16:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/8/2010	1:20:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/8/2010	1:20:35 PM	Recipe started at 1:20 PM
10/8/2010	1:20:35 PM	Helium valve closed
10/8/2010	1:20:35 PM	H2 valve closed
10/8/2010	1:20:35 PM	BCl3 valve closed
10/8/2010	1:20:35 PM	PH3 valve closed
10/8/2010	1:20:35 PM	SiCl4 pre valve closed
10/8/2010	1:20:35 PM	SiCl4 post valve closed
10/8/2010	1:20:35 PM	Main Vac valve closed
10/8/2010	1:20:35 PM	Bubbler valve closed
10/8/2010	1:20:35 PM	Bypass valve opened
10/8/2010	1:20:35 PM	Helium MFC set to  0.000000
10/8/2010	1:20:35 PM	H2 MFC set to  0.000000
10/8/2010	1:20:35 PM	BCl3 MFC set to  0.000000
10/8/2010	1:20:35 PM	PHl3 MFC set to  0.000000
10/8/2010	1:20:35 PM	SiCl4 MFC set to  0.000000
10/8/2010	1:20:35 PM	Bypass solenoid MFC set to  0.000000
10/8/2010	1:20:35 PM	Tube furnace set to 0
10/8/2010	1:21:27 PM	Helium valve closed
10/8/2010	1:21:27 PM	H2 valve closed
10/8/2010	1:21:27 PM	BCl3 valve closed
10/8/2010	1:21:27 PM	PH3 valve closed
10/8/2010	1:21:27 PM	SiCl4 pre valve closed
10/8/2010	1:21:27 PM	SiCl4 post valve closed
10/8/2010	1:21:27 PM	Bubbler valve closed
10/8/2010	1:21:27 PM	Main Vac valve opened
10/8/2010	1:21:27 PM	Bypass valve opened
10/8/2010	1:21:27 PM	Helium MFC set to  0.000000
10/8/2010	1:21:27 PM	H2 MFC set to  0.000000
10/8/2010	1:21:27 PM	BCl3 MFC set to  0.000000
10/8/2010	1:21:27 PM	PHl3 MFC set to  0.000000
10/8/2010	1:21:27 PM	SiCl4 MFC set to  0.000000
10/8/2010	1:21:27 PM	Bypass solenoid MFC set to  0.000000
10/8/2010	1:21:27 PM	Tube furnace set to 0
10/8/2010	1:21:27 PM	Run finished at 1:21 PM
10/8/2010	1:21:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/8/2010	1:21:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/8/2010	1:21:44 PM	Recipe started at 1:21 PM
10/8/2010	1:21:44 PM	Helium valve closed
10/8/2010	1:21:44 PM	H2 valve closed
10/8/2010	1:21:44 PM	BCl3 valve closed
10/8/2010	1:21:44 PM	PH3 valve closed
10/8/2010	1:21:44 PM	SiCl4 pre valve closed
10/8/2010	1:21:44 PM	SiCl4 post valve closed
10/8/2010	1:21:44 PM	Main Vac valve closed
10/8/2010	1:21:44 PM	Bubbler valve closed
10/8/2010	1:21:44 PM	Bypass valve opened
10/8/2010	1:21:44 PM	Helium MFC set to  0.000000
10/8/2010	1:21:44 PM	H2 MFC set to  0.000000
10/8/2010	1:21:44 PM	BCl3 MFC set to  0.000000
10/8/2010	1:21:44 PM	PHl3 MFC set to  0.000000
10/8/2010	1:21:44 PM	SiCl4 MFC set to  0.000000
10/8/2010	1:21:44 PM	Bypass solenoid MFC set to  0.000000
10/8/2010	1:21:44 PM	Tube furnace set to 0
10/8/2010	1:21:45 PM	Helium valve closed
10/8/2010	1:21:45 PM	H2 valve closed
10/8/2010	1:21:45 PM	BCl3 valve closed
10/8/2010	1:21:45 PM	PH3 valve closed
10/8/2010	1:21:45 PM	SiCl4 pre valve closed
10/8/2010	1:21:45 PM	SiCl4 post valve closed
10/8/2010	1:21:45 PM	Bubbler valve closed
10/8/2010	1:21:45 PM	Main Vac valve opened
10/8/2010	1:21:45 PM	Bypass valve opened
10/8/2010	1:21:45 PM	Helium MFC set to  0.000000
10/8/2010	1:21:45 PM	H2 MFC set to  0.000000
10/8/2010	1:21:45 PM	BCl3 MFC set to  0.000000
10/8/2010	1:21:45 PM	PHl3 MFC set to  0.000000
10/8/2010	1:21:45 PM	SiCl4 MFC set to  0.000000
10/8/2010	1:21:45 PM	Bypass solenoid MFC set to  0.000000
10/8/2010	1:21:45 PM	Tube furnace set to 0
10/8/2010	1:22:45 PM	H2 valve closed
10/8/2010	1:22:45 PM	BCl3 valve closed
10/8/2010	1:22:45 PM	PH3 valve closed
10/8/2010	1:22:45 PM	SiCl4 pre valve closed
10/8/2010	1:22:45 PM	SiCl4 post valve closed
10/8/2010	1:22:45 PM	Bubbler valve closed
10/8/2010	1:22:45 PM	Helium valve opened
10/8/2010	1:22:45 PM	Main Vac valve opened
10/8/2010	1:22:45 PM	Bypass valve opened
10/8/2010	1:22:45 PM	Helium MFC set to  100.000000
10/8/2010	1:22:45 PM	H2 MFC set to  0.000000
10/8/2010	1:22:45 PM	BCl3 MFC set to  0.000000
10/8/2010	1:22:45 PM	PHl3 MFC set to  0.000000
10/8/2010	1:22:45 PM	SiCl4 MFC set to  0.000000
10/8/2010	1:22:45 PM	Bypass solenoid MFC set to  0.000000
10/8/2010	1:22:45 PM	Tube furnace set to 0
10/8/2010	1:23:45 PM	Helium valve closed
10/8/2010	1:23:45 PM	H2 valve closed
10/8/2010	1:23:45 PM	BCl3 valve closed
10/8/2010	1:23:45 PM	PH3 valve closed
10/8/2010	1:23:45 PM	SiCl4 pre valve closed
10/8/2010	1:23:45 PM	SiCl4 post valve closed
10/8/2010	1:23:45 PM	Bubbler valve closed
10/8/2010	1:23:45 PM	Main Vac valve opened
10/8/2010	1:23:45 PM	Bypass valve opened
10/8/2010	1:23:45 PM	Helium MFC set to  0.000000
10/8/2010	1:23:45 PM	H2 MFC set to  0.000000
10/8/2010	1:23:45 PM	BCl3 MFC set to  0.000000
10/8/2010	1:23:45 PM	PHl3 MFC set to  0.000000
10/8/2010	1:23:45 PM	SiCl4 MFC set to  0.000000
10/8/2010	1:23:45 PM	Bypass solenoid MFC set to  0.000000
10/8/2010	1:23:45 PM	Tube furnace set to 0
10/8/2010	1:24:45 PM	H2 valve closed
10/8/2010	1:24:45 PM	BCl3 valve closed
10/8/2010	1:24:45 PM	PH3 valve closed
10/8/2010	1:24:45 PM	SiCl4 pre valve closed
10/8/2010	1:24:45 PM	SiCl4 post valve closed
10/8/2010	1:24:45 PM	Bubbler valve closed
10/8/2010	1:24:45 PM	Helium valve opened
10/8/2010	1:24:45 PM	Main Vac valve opened
10/8/2010	1:24:45 PM	Bypass valve opened
10/8/2010	1:24:45 PM	Helium MFC set to  100.000000
10/8/2010	1:24:45 PM	H2 MFC set to  0.000000
10/8/2010	1:24:45 PM	BCl3 MFC set to  0.000000
10/8/2010	1:24:45 PM	PHl3 MFC set to  0.000000
10/8/2010	1:24:45 PM	SiCl4 MFC set to  0.000000
10/8/2010	1:24:45 PM	Bypass solenoid MFC set to  0.000000
10/8/2010	1:24:45 PM	Tube furnace set to 0
10/8/2010	1:25:45 PM	Helium valve closed
10/8/2010	1:25:45 PM	H2 valve closed
10/8/2010	1:25:45 PM	BCl3 valve closed
10/8/2010	1:25:45 PM	PH3 valve closed
10/8/2010	1:25:45 PM	SiCl4 pre valve closed
10/8/2010	1:25:45 PM	SiCl4 post valve closed
10/8/2010	1:25:45 PM	Bubbler valve closed
10/8/2010	1:25:45 PM	Main Vac valve opened
10/8/2010	1:25:45 PM	Bypass valve opened
10/8/2010	1:25:45 PM	Helium MFC set to  0.000000
10/8/2010	1:25:45 PM	H2 MFC set to  0.000000
10/8/2010	1:25:45 PM	BCl3 MFC set to  0.000000
10/8/2010	1:25:45 PM	PHl3 MFC set to  0.000000
10/8/2010	1:25:45 PM	SiCl4 MFC set to  0.000000
10/8/2010	1:25:45 PM	Bypass solenoid MFC set to  0.000000
10/8/2010	1:25:46 PM	Tube furnace set to 0
10/8/2010	1:26:46 PM	H2 valve closed
10/8/2010	1:26:46 PM	BCl3 valve closed
10/8/2010	1:26:46 PM	PH3 valve closed
10/8/2010	1:26:46 PM	SiCl4 pre valve closed
10/8/2010	1:26:46 PM	SiCl4 post valve closed
10/8/2010	1:26:46 PM	Bubbler valve closed
10/8/2010	1:26:46 PM	Helium valve opened
10/8/2010	1:26:46 PM	Main Vac valve opened
10/8/2010	1:26:46 PM	Bypass valve opened
10/8/2010	1:26:46 PM	Helium MFC set to  100.000000
10/8/2010	1:26:46 PM	H2 MFC set to  0.000000
10/8/2010	1:26:46 PM	BCl3 MFC set to  0.000000
10/8/2010	1:26:46 PM	PHl3 MFC set to  0.000000
10/8/2010	1:26:46 PM	SiCl4 MFC set to  0.000000
10/8/2010	1:26:46 PM	Bypass solenoid MFC set to  0.000000
10/8/2010	1:26:46 PM	Tube furnace set to 0
10/8/2010	1:27:46 PM	Helium valve closed
10/8/2010	1:27:46 PM	H2 valve closed
10/8/2010	1:27:46 PM	BCl3 valve closed
10/8/2010	1:27:46 PM	PH3 valve closed
10/8/2010	1:27:46 PM	SiCl4 pre valve closed
10/8/2010	1:27:46 PM	SiCl4 post valve closed
10/8/2010	1:27:46 PM	Bubbler valve closed
10/8/2010	1:27:46 PM	Main Vac valve opened
10/8/2010	1:27:46 PM	Bypass valve opened
10/8/2010	1:27:46 PM	Helium MFC set to  0.000000
10/8/2010	1:27:46 PM	H2 MFC set to  0.000000
10/8/2010	1:27:46 PM	BCl3 MFC set to  0.000000
10/8/2010	1:27:46 PM	PHl3 MFC set to  0.000000
10/8/2010	1:27:46 PM	SiCl4 MFC set to  0.000000
10/8/2010	1:27:46 PM	Bypass solenoid MFC set to  0.000000
10/8/2010	1:27:46 PM	Tube furnace set to 0
10/8/2010	1:28:46 PM	H2 valve closed
10/8/2010	1:28:46 PM	BCl3 valve closed
10/8/2010	1:28:46 PM	PH3 valve closed
10/8/2010	1:28:46 PM	SiCl4 pre valve closed
10/8/2010	1:28:46 PM	SiCl4 post valve closed
10/8/2010	1:28:46 PM	Bubbler valve closed
10/8/2010	1:28:46 PM	Helium valve opened
10/8/2010	1:28:46 PM	Main Vac valve opened
10/8/2010	1:28:46 PM	Bypass valve opened
10/8/2010	1:28:46 PM	Helium MFC set to  100.000000
10/8/2010	1:28:46 PM	H2 MFC set to  0.000000
10/8/2010	1:28:46 PM	BCl3 MFC set to  0.000000
10/8/2010	1:28:46 PM	PHl3 MFC set to  0.000000
10/8/2010	1:28:46 PM	SiCl4 MFC set to  0.000000
10/8/2010	1:28:46 PM	Bypass solenoid MFC set to  0.000000
10/8/2010	1:28:46 PM	Tube furnace set to 0
10/8/2010	1:29:46 PM	Helium valve closed
10/8/2010	1:29:46 PM	H2 valve closed
10/8/2010	1:29:46 PM	BCl3 valve closed
10/8/2010	1:29:46 PM	PH3 valve closed
10/8/2010	1:29:46 PM	SiCl4 pre valve closed
10/8/2010	1:29:46 PM	SiCl4 post valve closed
10/8/2010	1:29:46 PM	Bubbler valve closed
10/8/2010	1:29:46 PM	Main Vac valve opened
10/8/2010	1:29:46 PM	Bypass valve opened
10/8/2010	1:29:46 PM	Helium MFC set to  0.000000
10/8/2010	1:29:46 PM	H2 MFC set to  0.000000
10/8/2010	1:29:46 PM	BCl3 MFC set to  0.000000
10/8/2010	1:29:46 PM	PHl3 MFC set to  0.000000
10/8/2010	1:29:46 PM	SiCl4 MFC set to  0.000000
10/8/2010	1:29:46 PM	Bypass solenoid MFC set to  0.000000
10/8/2010	1:29:46 PM	Tube furnace set to 0
10/8/2010	1:30:46 PM	H2 valve closed
10/8/2010	1:30:46 PM	BCl3 valve closed
10/8/2010	1:30:46 PM	PH3 valve closed
10/8/2010	1:30:46 PM	SiCl4 pre valve closed
10/8/2010	1:30:46 PM	SiCl4 post valve closed
10/8/2010	1:30:46 PM	Bubbler valve closed
10/8/2010	1:30:46 PM	Helium valve opened
10/8/2010	1:30:46 PM	Main Vac valve opened
10/8/2010	1:30:46 PM	Bypass valve opened
10/8/2010	1:30:46 PM	Helium MFC set to  100.000000
10/8/2010	1:30:46 PM	H2 MFC set to  0.000000
10/8/2010	1:30:46 PM	BCl3 MFC set to  0.000000
10/8/2010	1:30:46 PM	PHl3 MFC set to  0.000000
10/8/2010	1:30:46 PM	SiCl4 MFC set to  0.000000
10/8/2010	1:30:46 PM	Bypass solenoid MFC set to  0.000000
10/8/2010	1:30:47 PM	Tube furnace set to 0
10/8/2010	1:31:47 PM	Helium valve closed
10/8/2010	1:31:47 PM	H2 valve closed
10/8/2010	1:31:47 PM	BCl3 valve closed
10/8/2010	1:31:47 PM	PH3 valve closed
10/8/2010	1:31:47 PM	SiCl4 pre valve closed
10/8/2010	1:31:47 PM	SiCl4 post valve closed
10/8/2010	1:31:47 PM	Bubbler valve closed
10/8/2010	1:31:47 PM	Main Vac valve opened
10/8/2010	1:31:47 PM	Bypass valve opened
10/8/2010	1:31:47 PM	Helium MFC set to  0.000000
10/8/2010	1:31:47 PM	H2 MFC set to  0.000000
10/8/2010	1:31:47 PM	BCl3 MFC set to  0.000000
10/8/2010	1:31:47 PM	PHl3 MFC set to  0.000000
10/8/2010	1:31:47 PM	SiCl4 MFC set to  0.000000
10/8/2010	1:31:47 PM	Bypass solenoid MFC set to  0.000000
10/8/2010	1:31:47 PM	Tube furnace set to 0
10/8/2010	1:32:47 PM	H2 valve closed
10/8/2010	1:32:47 PM	BCl3 valve closed
10/8/2010	1:32:47 PM	PH3 valve closed
10/8/2010	1:32:47 PM	SiCl4 pre valve closed
10/8/2010	1:32:47 PM	SiCl4 post valve closed
10/8/2010	1:32:47 PM	Bubbler valve closed
10/8/2010	1:32:47 PM	Helium valve opened
10/8/2010	1:32:47 PM	Main Vac valve opened
10/8/2010	1:32:47 PM	Bypass valve opened
10/8/2010	1:32:47 PM	Helium MFC set to  100.000000
10/8/2010	1:32:47 PM	H2 MFC set to  0.000000
10/8/2010	1:32:47 PM	BCl3 MFC set to  0.000000
10/8/2010	1:32:47 PM	PHl3 MFC set to  0.000000
10/8/2010	1:32:47 PM	SiCl4 MFC set to  0.000000
10/8/2010	1:32:47 PM	Bypass solenoid MFC set to  0.000000
10/8/2010	1:32:47 PM	Tube furnace set to 0
10/8/2010	1:33:47 PM	Helium valve closed
10/8/2010	1:33:47 PM	H2 valve closed
10/8/2010	1:33:47 PM	BCl3 valve closed
10/8/2010	1:33:47 PM	PH3 valve closed
10/8/2010	1:33:47 PM	SiCl4 pre valve closed
10/8/2010	1:33:47 PM	SiCl4 post valve closed
10/8/2010	1:33:47 PM	Bubbler valve closed
10/8/2010	1:33:47 PM	Main Vac valve opened
10/8/2010	1:33:47 PM	Bypass valve opened
10/8/2010	1:33:47 PM	Helium MFC set to  0.000000
10/8/2010	1:33:47 PM	H2 MFC set to  0.000000
10/8/2010	1:33:47 PM	BCl3 MFC set to  0.000000
10/8/2010	1:33:47 PM	PHl3 MFC set to  0.000000
10/8/2010	1:33:47 PM	SiCl4 MFC set to  0.000000
10/8/2010	1:33:47 PM	Bypass solenoid MFC set to  0.000000
10/8/2010	1:33:47 PM	Tube furnace set to 0
10/8/2010	1:34:47 PM	H2 valve closed
10/8/2010	1:34:47 PM	BCl3 valve closed
10/8/2010	1:34:47 PM	PH3 valve closed
10/8/2010	1:34:47 PM	SiCl4 pre valve closed
10/8/2010	1:34:47 PM	SiCl4 post valve closed
10/8/2010	1:34:47 PM	Bubbler valve closed
10/8/2010	1:34:47 PM	Helium valve opened
10/8/2010	1:34:47 PM	Main Vac valve opened
10/8/2010	1:34:47 PM	Bypass valve opened
10/8/2010	1:34:47 PM	Helium MFC set to  100.000000
10/8/2010	1:34:47 PM	H2 MFC set to  0.000000
10/8/2010	1:34:47 PM	BCl3 MFC set to  0.000000
10/8/2010	1:34:47 PM	PHl3 MFC set to  0.000000
10/8/2010	1:34:47 PM	SiCl4 MFC set to  0.000000
10/8/2010	1:34:47 PM	Bypass solenoid MFC set to  0.000000
10/8/2010	1:34:47 PM	Tube furnace set to 0
10/8/2010	1:35:47 PM	Helium valve closed
10/8/2010	1:35:47 PM	H2 valve closed
10/8/2010	1:35:47 PM	BCl3 valve closed
10/8/2010	1:35:47 PM	PH3 valve closed
10/8/2010	1:35:47 PM	SiCl4 pre valve closed
10/8/2010	1:35:47 PM	SiCl4 post valve closed
10/8/2010	1:35:47 PM	Bubbler valve closed
10/8/2010	1:35:47 PM	Main Vac valve opened
10/8/2010	1:35:47 PM	Bypass valve opened
10/8/2010	1:35:47 PM	Helium MFC set to  0.000000
10/8/2010	1:35:47 PM	H2 MFC set to  0.000000
10/8/2010	1:35:47 PM	BCl3 MFC set to  0.000000
10/8/2010	1:35:47 PM	PHl3 MFC set to  0.000000
10/8/2010	1:35:47 PM	SiCl4 MFC set to  0.000000
10/8/2010	1:35:47 PM	Bypass solenoid MFC set to  0.000000
10/8/2010	1:35:48 PM	Tube furnace set to 0
10/8/2010	1:36:48 PM	H2 valve closed
10/8/2010	1:36:48 PM	BCl3 valve closed
10/8/2010	1:36:48 PM	PH3 valve closed
10/8/2010	1:36:48 PM	SiCl4 pre valve closed
10/8/2010	1:36:48 PM	SiCl4 post valve closed
10/8/2010	1:36:48 PM	Bubbler valve closed
10/8/2010	1:36:48 PM	Helium valve opened
10/8/2010	1:36:48 PM	Main Vac valve opened
10/8/2010	1:36:48 PM	Bypass valve opened
10/8/2010	1:36:48 PM	Helium MFC set to  100.000000
10/8/2010	1:36:48 PM	H2 MFC set to  0.000000
10/8/2010	1:36:48 PM	BCl3 MFC set to  0.000000
10/8/2010	1:36:48 PM	PHl3 MFC set to  0.000000
10/8/2010	1:36:48 PM	SiCl4 MFC set to  0.000000
10/8/2010	1:36:48 PM	Bypass solenoid MFC set to  0.000000
10/8/2010	1:36:48 PM	Tube furnace set to 0
10/8/2010	1:37:48 PM	Helium valve closed
10/8/2010	1:37:48 PM	H2 valve closed
10/8/2010	1:37:48 PM	BCl3 valve closed
10/8/2010	1:37:48 PM	PH3 valve closed
10/8/2010	1:37:48 PM	SiCl4 pre valve closed
10/8/2010	1:37:48 PM	SiCl4 post valve closed
10/8/2010	1:37:48 PM	Bubbler valve closed
10/8/2010	1:37:48 PM	Main Vac valve opened
10/8/2010	1:37:48 PM	Bypass valve opened
10/8/2010	1:37:48 PM	Helium MFC set to  0.000000
10/8/2010	1:37:48 PM	H2 MFC set to  0.000000
10/8/2010	1:37:48 PM	BCl3 MFC set to  0.000000
10/8/2010	1:37:48 PM	PHl3 MFC set to  0.000000
10/8/2010	1:37:48 PM	SiCl4 MFC set to  0.000000
10/8/2010	1:37:48 PM	Bypass solenoid MFC set to  0.000000
10/8/2010	1:37:48 PM	Tube furnace set to 0
10/8/2010	1:38:48 PM	H2 valve closed
10/8/2010	1:38:48 PM	BCl3 valve closed
10/8/2010	1:38:48 PM	PH3 valve closed
10/8/2010	1:38:48 PM	SiCl4 pre valve closed
10/8/2010	1:38:48 PM	SiCl4 post valve closed
10/8/2010	1:38:48 PM	Bubbler valve closed
10/8/2010	1:38:48 PM	Helium valve opened
10/8/2010	1:38:48 PM	Main Vac valve opened
10/8/2010	1:38:48 PM	Bypass valve opened
10/8/2010	1:38:48 PM	Helium MFC set to  100.000000
10/8/2010	1:38:48 PM	H2 MFC set to  0.000000
10/8/2010	1:38:48 PM	BCl3 MFC set to  0.000000
10/8/2010	1:38:48 PM	PHl3 MFC set to  0.000000
10/8/2010	1:38:48 PM	SiCl4 MFC set to  0.000000
10/8/2010	1:38:48 PM	Bypass solenoid MFC set to  0.000000
10/8/2010	1:38:48 PM	Tube furnace set to 0
10/8/2010	1:39:48 PM	Helium valve closed
10/8/2010	1:39:48 PM	H2 valve closed
10/8/2010	1:39:48 PM	BCl3 valve closed
10/8/2010	1:39:48 PM	PH3 valve closed
10/8/2010	1:39:48 PM	SiCl4 pre valve closed
10/8/2010	1:39:48 PM	SiCl4 post valve closed
10/8/2010	1:39:48 PM	Bubbler valve closed
10/8/2010	1:39:48 PM	Main Vac valve opened
10/8/2010	1:39:48 PM	Bypass valve opened
10/8/2010	1:39:48 PM	Helium MFC set to  0.000000
10/8/2010	1:39:48 PM	H2 MFC set to  0.000000
10/8/2010	1:39:48 PM	BCl3 MFC set to  0.000000
10/8/2010	1:39:48 PM	PHl3 MFC set to  0.000000
10/8/2010	1:39:48 PM	SiCl4 MFC set to  0.000000
10/8/2010	1:39:48 PM	Bypass solenoid MFC set to  0.000000
10/8/2010	1:39:48 PM	Tube furnace set to 0
10/8/2010	1:40:48 PM	H2 valve closed
10/8/2010	1:40:48 PM	BCl3 valve closed
10/8/2010	1:40:48 PM	PH3 valve closed
10/8/2010	1:40:48 PM	SiCl4 pre valve closed
10/8/2010	1:40:48 PM	SiCl4 post valve closed
10/8/2010	1:40:48 PM	Bubbler valve closed
10/8/2010	1:40:48 PM	Helium valve opened
10/8/2010	1:40:48 PM	Main Vac valve opened
10/8/2010	1:40:48 PM	Bypass valve opened
10/8/2010	1:40:48 PM	Helium MFC set to  100.000000
10/8/2010	1:40:48 PM	H2 MFC set to  0.000000
10/8/2010	1:40:48 PM	BCl3 MFC set to  0.000000
10/8/2010	1:40:48 PM	PHl3 MFC set to  0.000000
10/8/2010	1:40:48 PM	SiCl4 MFC set to  0.000000
10/8/2010	1:40:48 PM	Bypass solenoid MFC set to  0.000000
10/8/2010	1:40:49 PM	Tube furnace set to 0
10/8/2010	1:41:49 PM	Helium valve closed
10/8/2010	1:41:49 PM	H2 valve closed
10/8/2010	1:41:49 PM	BCl3 valve closed
10/8/2010	1:41:49 PM	PH3 valve closed
10/8/2010	1:41:49 PM	SiCl4 pre valve closed
10/8/2010	1:41:49 PM	SiCl4 post valve closed
10/8/2010	1:41:49 PM	Bubbler valve closed
10/8/2010	1:41:49 PM	Main Vac valve opened
10/8/2010	1:41:49 PM	Bypass valve opened
10/8/2010	1:41:49 PM	Helium MFC set to  0.000000
10/8/2010	1:41:49 PM	H2 MFC set to  0.000000
10/8/2010	1:41:49 PM	BCl3 MFC set to  0.000000
10/8/2010	1:41:49 PM	PHl3 MFC set to  0.000000
10/8/2010	1:41:49 PM	SiCl4 MFC set to  0.000000
10/8/2010	1:41:49 PM	Bypass solenoid MFC set to  0.000000
10/8/2010	1:41:49 PM	Tube furnace set to 0
10/8/2010	1:41:50 PM	Run finished at 1:41 PM
10/8/2010	1:41:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/8/2010	1:45:11 PM	Helium MFC set to  100.000000
10/8/2010	1:45:12 PM	Helium valve opened
10/8/2010	1:46:17 PM	Helium MFC set to  0.000000
10/8/2010	1:46:17 PM	Helium valve closed
10/8/2010	1:47:05 PM	Helium MFC set to  100.000000
10/8/2010	1:47:07 PM	Helium valve opened
10/8/2010	1:47:38 PM	Helium MFC set to  0.000000
10/8/2010	1:47:39 PM	Helium valve closed
10/8/2010	1:49:15 PM	Helium MFC set to  100.000000
10/8/2010	1:49:16 PM	Helium valve opened
10/8/2010	1:49:56 PM	Helium MFC set to  0.000000
10/8/2010	1:49:57 PM	Helium valve closed
10/8/2010	1:57:17 PM	Main Vac valve closed
10/8/2010	1:57:20 PM	Bypass valve closed
10/8/2010	1:57:28 PM	Bypass valve opened
10/8/2010	1:57:29 PM	Main Vac valve opened
10/8/2010	1:57:43 PM	Helium MFC set to  200.000000
10/8/2010	1:57:44 PM	Helium valve opened
10/8/2010	1:58:02 PM	Helium MFC set to  0.000000
10/8/2010	1:58:02 PM	Helium valve closed
10/8/2010	1:59:56 PM	Recipe started at 1:59 PM
10/8/2010	1:59:56 PM	Helium valve closed
10/8/2010	1:59:56 PM	BCl3 valve closed
10/8/2010	1:59:56 PM	PH3 valve closed
10/8/2010	1:59:56 PM	SiCl4 pre valve closed
10/8/2010	1:59:56 PM	SiCl4 post valve closed
10/8/2010	1:59:56 PM	Main Vac valve closed
10/8/2010	1:59:56 PM	Bypass valve closed
10/8/2010	1:59:56 PM	Bubbler valve closed
10/8/2010	1:59:56 PM	H2 valve opened
10/8/2010	1:59:56 PM	Helium MFC set to  0.000000
10/8/2010	1:59:56 PM	H2 MFC set to  500.000000
10/8/2010	1:59:56 PM	BCl3 MFC set to  0.000000
10/8/2010	1:59:56 PM	PHl3 MFC set to  0.000000
10/8/2010	1:59:56 PM	SiCl4 MFC set to  0.000000
10/8/2010	1:59:56 PM	Bypass solenoid MFC set to  0.000000
10/8/2010	1:59:56 PM	Tube furnace set to 100
10/8/2010	2:01:16 PM	Helium valve closed
10/8/2010	2:01:16 PM	BCl3 valve closed
10/8/2010	2:01:16 PM	PH3 valve closed
10/8/2010	2:01:16 PM	SiCl4 pre valve closed
10/8/2010	2:01:16 PM	SiCl4 post valve closed
10/8/2010	2:01:16 PM	Main Vac valve closed
10/8/2010	2:01:16 PM	Bypass valve closed
10/8/2010	2:01:16 PM	H2 valve opened
10/8/2010	2:01:16 PM	Bubbler valve opened
10/8/2010	2:01:16 PM	Helium MFC set to  0.000000
10/8/2010	2:01:16 PM	H2 MFC set to  500.000000
10/8/2010	2:01:16 PM	BCl3 MFC set to  0.000000
10/8/2010	2:01:16 PM	PHl3 MFC set to  0.000000
10/8/2010	2:01:16 PM	SiCl4 MFC set to  0.000000
10/8/2010	2:01:16 PM	Bypass solenoid MFC set to  0.000000
10/8/2010	2:01:16 PM	Tube furnace set to 1000
10/8/2010	2:21:16 PM	Helium valve closed
10/8/2010	2:21:16 PM	PH3 valve closed
10/8/2010	2:21:16 PM	Main Vac valve closed
10/8/2010	2:21:16 PM	Bypass valve closed
10/8/2010	2:21:16 PM	H2 valve opened
10/8/2010	2:21:16 PM	BCl3 valve opened
10/8/2010	2:21:16 PM	SiCl4 pre valve opened
10/8/2010	2:21:16 PM	SiCl4 post valve opened
10/8/2010	2:21:16 PM	Bubbler valve opened
10/8/2010	2:21:16 PM	Helium MFC set to  0.000000
10/8/2010	2:21:16 PM	H2 MFC set to  500.000000
10/8/2010	2:21:16 PM	BCl3 MFC set to  12.000000
10/8/2010	2:21:16 PM	PHl3 MFC set to  0.000000
10/8/2010	2:21:16 PM	SiCl4 MFC set to  50.000000
10/8/2010	2:21:16 PM	Bypass solenoid MFC set to  0.000000
10/8/2010	2:21:16 PM	Tube furnace set to 1000
10/8/2010	2:36:16 PM	H2 valve closed
10/8/2010	2:36:16 PM	BCl3 valve closed
10/8/2010	2:36:16 PM	PH3 valve closed
10/8/2010	2:36:16 PM	SiCl4 pre valve closed
10/8/2010	2:36:16 PM	SiCl4 post valve closed
10/8/2010	2:36:16 PM	Main Vac valve closed
10/8/2010	2:36:16 PM	Bypass valve closed
10/8/2010	2:36:16 PM	Helium valve opened
10/8/2010	2:36:16 PM	Bubbler valve opened
10/8/2010	2:36:16 PM	Helium MFC set to  500.000000
10/8/2010	2:36:16 PM	H2 MFC set to  0.000000
10/8/2010	2:36:16 PM	BCl3 MFC set to  0.000000
10/8/2010	2:36:16 PM	PHl3 MFC set to  0.000000
10/8/2010	2:36:16 PM	SiCl4 MFC set to  0.000000
10/8/2010	2:36:16 PM	Bypass solenoid MFC set to  0.000000
10/8/2010	2:36:16 PM	Tube furnace set to 0
10/8/2010	2:56:16 PM	Helium valve closed
10/8/2010	2:56:16 PM	H2 valve closed
10/8/2010	2:56:16 PM	BCl3 valve closed
10/8/2010	2:56:16 PM	PH3 valve closed
10/8/2010	2:56:16 PM	SiCl4 pre valve closed
10/8/2010	2:56:16 PM	SiCl4 post valve closed
10/8/2010	2:56:16 PM	Main Vac valve closed
10/8/2010	2:56:16 PM	Bypass valve closed
10/8/2010	2:56:16 PM	Bubbler valve closed
10/8/2010	2:56:16 PM	Helium MFC set to  0.000000
10/8/2010	2:56:16 PM	H2 MFC set to  0.000000
10/8/2010	2:56:16 PM	BCl3 MFC set to  0.000000
10/8/2010	2:56:16 PM	PHl3 MFC set to  0.000000
10/8/2010	2:56:16 PM	SiCl4 MFC set to  0.000000
10/8/2010	2:56:16 PM	Bypass solenoid MFC set to  0.000000
10/8/2010	2:56:17 PM	Tube furnace set to 0
10/8/2010	2:56:17 PM	Run finished at 2:56 PM
10/8/2010	3:10:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/8/2010	3:11:06 PM	Recipe started at 3:11 PM
10/8/2010	3:11:06 PM	Helium valve closed
10/8/2010	3:11:06 PM	H2 valve closed
10/8/2010	3:11:06 PM	BCl3 valve closed
10/8/2010	3:11:06 PM	PH3 valve closed
10/8/2010	3:11:06 PM	SiCl4 pre valve closed
10/8/2010	3:11:06 PM	SiCl4 post valve closed
10/8/2010	3:11:06 PM	Main Vac valve closed
10/8/2010	3:11:06 PM	Bubbler valve closed
10/8/2010	3:11:06 PM	Bypass valve opened
10/8/2010	3:11:06 PM	Helium MFC set to  0.000000
10/8/2010	3:11:06 PM	H2 MFC set to  0.000000
10/8/2010	3:11:06 PM	BCl3 MFC set to  0.000000
10/8/2010	3:11:06 PM	PHl3 MFC set to  0.000000
10/8/2010	3:11:06 PM	SiCl4 MFC set to  0.000000
10/8/2010	3:11:06 PM	Bypass solenoid MFC set to  0.000000
10/8/2010	3:11:06 PM	Tube furnace set to 0
10/8/2010	3:11:57 PM	Helium valve closed
10/8/2010	3:11:57 PM	H2 valve closed
10/8/2010	3:11:57 PM	BCl3 valve closed
10/8/2010	3:11:57 PM	PH3 valve closed
10/8/2010	3:11:57 PM	SiCl4 pre valve closed
10/8/2010	3:11:57 PM	SiCl4 post valve closed
10/8/2010	3:11:57 PM	Bubbler valve closed
10/8/2010	3:11:57 PM	Main Vac valve opened
10/8/2010	3:11:57 PM	Bypass valve opened
10/8/2010	3:11:57 PM	Helium MFC set to  0.000000
10/8/2010	3:11:57 PM	H2 MFC set to  0.000000
10/8/2010	3:11:57 PM	BCl3 MFC set to  0.000000
10/8/2010	3:11:57 PM	PHl3 MFC set to  0.000000
10/8/2010	3:11:57 PM	SiCl4 MFC set to  0.000000
10/8/2010	3:11:57 PM	Bypass solenoid MFC set to  0.000000
10/8/2010	3:11:57 PM	Tube furnace set to 0
10/8/2010	3:12:57 PM	H2 valve closed
10/8/2010	3:12:57 PM	BCl3 valve closed
10/8/2010	3:12:57 PM	PH3 valve closed
10/8/2010	3:12:57 PM	SiCl4 pre valve closed
10/8/2010	3:12:57 PM	SiCl4 post valve closed
10/8/2010	3:12:57 PM	Bubbler valve closed
10/8/2010	3:12:57 PM	Helium valve opened
10/8/2010	3:12:57 PM	Main Vac valve opened
10/8/2010	3:12:57 PM	Bypass valve opened
10/8/2010	3:12:57 PM	Helium MFC set to  100.000000
10/8/2010	3:12:57 PM	H2 MFC set to  0.000000
10/8/2010	3:12:57 PM	BCl3 MFC set to  0.000000
10/8/2010	3:12:57 PM	PHl3 MFC set to  0.000000
10/8/2010	3:12:57 PM	SiCl4 MFC set to  0.000000
10/8/2010	3:12:57 PM	Bypass solenoid MFC set to  0.000000
10/8/2010	3:12:58 PM	Tube furnace set to 0
10/8/2010	3:13:58 PM	Helium valve closed
10/8/2010	3:13:58 PM	H2 valve closed
10/8/2010	3:13:58 PM	BCl3 valve closed
10/8/2010	3:13:58 PM	PH3 valve closed
10/8/2010	3:13:58 PM	SiCl4 pre valve closed
10/8/2010	3:13:58 PM	SiCl4 post valve closed
10/8/2010	3:13:58 PM	Bubbler valve closed
10/8/2010	3:13:58 PM	Main Vac valve opened
10/8/2010	3:13:58 PM	Bypass valve opened
10/8/2010	3:13:58 PM	Helium MFC set to  0.000000
10/8/2010	3:13:58 PM	H2 MFC set to  0.000000
10/8/2010	3:13:58 PM	BCl3 MFC set to  0.000000
10/8/2010	3:13:58 PM	PHl3 MFC set to  0.000000
10/8/2010	3:13:58 PM	SiCl4 MFC set to  0.000000
10/8/2010	3:13:58 PM	Bypass solenoid MFC set to  0.000000
10/8/2010	3:13:58 PM	Tube furnace set to 0
10/8/2010	3:14:58 PM	H2 valve closed
10/8/2010	3:14:58 PM	BCl3 valve closed
10/8/2010	3:14:58 PM	PH3 valve closed
10/8/2010	3:14:58 PM	SiCl4 pre valve closed
10/8/2010	3:14:58 PM	SiCl4 post valve closed
10/8/2010	3:14:58 PM	Bubbler valve closed
10/8/2010	3:14:58 PM	Helium valve opened
10/8/2010	3:14:58 PM	Main Vac valve opened
10/8/2010	3:14:58 PM	Bypass valve opened
10/8/2010	3:14:58 PM	Helium MFC set to  100.000000
10/8/2010	3:14:58 PM	H2 MFC set to  0.000000
10/8/2010	3:14:58 PM	BCl3 MFC set to  0.000000
10/8/2010	3:14:58 PM	PHl3 MFC set to  0.000000
10/8/2010	3:14:58 PM	SiCl4 MFC set to  0.000000
10/8/2010	3:14:58 PM	Bypass solenoid MFC set to  0.000000
10/8/2010	3:14:58 PM	Tube furnace set to 0
10/8/2010	3:15:58 PM	Helium valve closed
10/8/2010	3:15:58 PM	H2 valve closed
10/8/2010	3:15:58 PM	BCl3 valve closed
10/8/2010	3:15:58 PM	PH3 valve closed
10/8/2010	3:15:58 PM	SiCl4 pre valve closed
10/8/2010	3:15:58 PM	SiCl4 post valve closed
10/8/2010	3:15:58 PM	Bubbler valve closed
10/8/2010	3:15:58 PM	Main Vac valve opened
10/8/2010	3:15:58 PM	Bypass valve opened
10/8/2010	3:15:58 PM	Helium MFC set to  0.000000
10/8/2010	3:15:58 PM	H2 MFC set to  0.000000
10/8/2010	3:15:58 PM	BCl3 MFC set to  0.000000
10/8/2010	3:15:58 PM	PHl3 MFC set to  0.000000
10/8/2010	3:15:58 PM	SiCl4 MFC set to  0.000000
10/8/2010	3:15:58 PM	Bypass solenoid MFC set to  0.000000
10/8/2010	3:15:58 PM	Tube furnace set to 0
10/8/2010	3:16:58 PM	H2 valve closed
10/8/2010	3:16:58 PM	BCl3 valve closed
10/8/2010	3:16:58 PM	PH3 valve closed
10/8/2010	3:16:58 PM	SiCl4 pre valve closed
10/8/2010	3:16:58 PM	SiCl4 post valve closed
10/8/2010	3:16:58 PM	Bubbler valve closed
10/8/2010	3:16:58 PM	Helium valve opened
10/8/2010	3:16:58 PM	Main Vac valve opened
10/8/2010	3:16:58 PM	Bypass valve opened
10/8/2010	3:16:58 PM	Helium MFC set to  100.000000
10/8/2010	3:16:58 PM	H2 MFC set to  0.000000
10/8/2010	3:16:58 PM	BCl3 MFC set to  0.000000
10/8/2010	3:16:58 PM	PHl3 MFC set to  0.000000
10/8/2010	3:16:58 PM	SiCl4 MFC set to  0.000000
10/8/2010	3:16:58 PM	Bypass solenoid MFC set to  0.000000
10/8/2010	3:16:58 PM	Tube furnace set to 0
10/8/2010	3:17:58 PM	Helium valve closed
10/8/2010	3:17:58 PM	H2 valve closed
10/8/2010	3:17:58 PM	BCl3 valve closed
10/8/2010	3:17:58 PM	PH3 valve closed
10/8/2010	3:17:58 PM	SiCl4 pre valve closed
10/8/2010	3:17:58 PM	SiCl4 post valve closed
10/8/2010	3:17:58 PM	Bubbler valve closed
10/8/2010	3:17:58 PM	Main Vac valve opened
10/8/2010	3:17:58 PM	Bypass valve opened
10/8/2010	3:17:58 PM	Helium MFC set to  0.000000
10/8/2010	3:17:58 PM	H2 MFC set to  0.000000
10/8/2010	3:17:58 PM	BCl3 MFC set to  0.000000
10/8/2010	3:17:58 PM	PHl3 MFC set to  0.000000
10/8/2010	3:17:58 PM	SiCl4 MFC set to  0.000000
10/8/2010	3:17:58 PM	Bypass solenoid MFC set to  0.000000
10/8/2010	3:17:59 PM	Tube furnace set to 0
10/8/2010	3:18:59 PM	H2 valve closed
10/8/2010	3:18:59 PM	BCl3 valve closed
10/8/2010	3:18:59 PM	PH3 valve closed
10/8/2010	3:18:59 PM	SiCl4 pre valve closed
10/8/2010	3:18:59 PM	SiCl4 post valve closed
10/8/2010	3:18:59 PM	Bubbler valve closed
10/8/2010	3:18:59 PM	Helium valve opened
10/8/2010	3:18:59 PM	Main Vac valve opened
10/8/2010	3:18:59 PM	Bypass valve opened
10/8/2010	3:18:59 PM	Helium MFC set to  100.000000
10/8/2010	3:18:59 PM	H2 MFC set to  0.000000
10/8/2010	3:18:59 PM	BCl3 MFC set to  0.000000
10/8/2010	3:18:59 PM	PHl3 MFC set to  0.000000
10/8/2010	3:18:59 PM	SiCl4 MFC set to  0.000000
10/8/2010	3:18:59 PM	Bypass solenoid MFC set to  0.000000
10/8/2010	3:18:59 PM	Tube furnace set to 0
10/8/2010	3:19:59 PM	Helium valve closed
10/8/2010	3:19:59 PM	H2 valve closed
10/8/2010	3:19:59 PM	BCl3 valve closed
10/8/2010	3:19:59 PM	PH3 valve closed
10/8/2010	3:19:59 PM	SiCl4 pre valve closed
10/8/2010	3:19:59 PM	SiCl4 post valve closed
10/8/2010	3:19:59 PM	Bubbler valve closed
10/8/2010	3:19:59 PM	Main Vac valve opened
10/8/2010	3:19:59 PM	Bypass valve opened
10/8/2010	3:19:59 PM	Helium MFC set to  0.000000
10/8/2010	3:19:59 PM	H2 MFC set to  0.000000
10/8/2010	3:19:59 PM	BCl3 MFC set to  0.000000
10/8/2010	3:19:59 PM	PHl3 MFC set to  0.000000
10/8/2010	3:19:59 PM	SiCl4 MFC set to  0.000000
10/8/2010	3:19:59 PM	Bypass solenoid MFC set to  0.000000
10/8/2010	3:19:59 PM	Tube furnace set to 0
10/8/2010	3:20:59 PM	H2 valve closed
10/8/2010	3:20:59 PM	BCl3 valve closed
10/8/2010	3:20:59 PM	PH3 valve closed
10/8/2010	3:20:59 PM	SiCl4 pre valve closed
10/8/2010	3:20:59 PM	SiCl4 post valve closed
10/8/2010	3:20:59 PM	Bubbler valve closed
10/8/2010	3:20:59 PM	Helium valve opened
10/8/2010	3:20:59 PM	Main Vac valve opened
10/8/2010	3:20:59 PM	Bypass valve opened
10/8/2010	3:20:59 PM	Helium MFC set to  100.000000
10/8/2010	3:20:59 PM	H2 MFC set to  0.000000
10/8/2010	3:20:59 PM	BCl3 MFC set to  0.000000
10/8/2010	3:20:59 PM	PHl3 MFC set to  0.000000
10/8/2010	3:20:59 PM	SiCl4 MFC set to  0.000000
10/8/2010	3:20:59 PM	Bypass solenoid MFC set to  0.000000
10/8/2010	3:20:59 PM	Tube furnace set to 0
10/8/2010	3:21:59 PM	Helium valve closed
10/8/2010	3:21:59 PM	H2 valve closed
10/8/2010	3:21:59 PM	BCl3 valve closed
10/8/2010	3:21:59 PM	PH3 valve closed
10/8/2010	3:21:59 PM	SiCl4 pre valve closed
10/8/2010	3:21:59 PM	SiCl4 post valve closed
10/8/2010	3:21:59 PM	Bubbler valve closed
10/8/2010	3:21:59 PM	Main Vac valve opened
10/8/2010	3:21:59 PM	Bypass valve opened
10/8/2010	3:21:59 PM	Helium MFC set to  0.000000
10/8/2010	3:21:59 PM	H2 MFC set to  0.000000
10/8/2010	3:21:59 PM	BCl3 MFC set to  0.000000
10/8/2010	3:21:59 PM	PHl3 MFC set to  0.000000
10/8/2010	3:21:59 PM	SiCl4 MFC set to  0.000000
10/8/2010	3:21:59 PM	Bypass solenoid MFC set to  0.000000
10/8/2010	3:21:59 PM	Tube furnace set to 0
10/8/2010	3:22:59 PM	H2 valve closed
10/8/2010	3:22:59 PM	BCl3 valve closed
10/8/2010	3:22:59 PM	PH3 valve closed
10/8/2010	3:22:59 PM	SiCl4 pre valve closed
10/8/2010	3:22:59 PM	SiCl4 post valve closed
10/8/2010	3:22:59 PM	Bubbler valve closed
10/8/2010	3:22:59 PM	Helium valve opened
10/8/2010	3:22:59 PM	Main Vac valve opened
10/8/2010	3:22:59 PM	Bypass valve opened
10/8/2010	3:22:59 PM	Helium MFC set to  100.000000
10/8/2010	3:22:59 PM	H2 MFC set to  0.000000
10/8/2010	3:22:59 PM	BCl3 MFC set to  0.000000
10/8/2010	3:22:59 PM	PHl3 MFC set to  0.000000
10/8/2010	3:22:59 PM	SiCl4 MFC set to  0.000000
10/8/2010	3:22:59 PM	Bypass solenoid MFC set to  0.000000
10/8/2010	3:22:59 PM	Tube furnace set to 0
10/8/2010	3:24:00 PM	Helium valve closed
10/8/2010	3:24:00 PM	H2 valve closed
10/8/2010	3:24:00 PM	BCl3 valve closed
10/8/2010	3:24:00 PM	PH3 valve closed
10/8/2010	3:24:00 PM	SiCl4 pre valve closed
10/8/2010	3:24:00 PM	SiCl4 post valve closed
10/8/2010	3:24:00 PM	Bubbler valve closed
10/8/2010	3:24:00 PM	Main Vac valve opened
10/8/2010	3:24:00 PM	Bypass valve opened
10/8/2010	3:24:00 PM	Helium MFC set to  0.000000
10/8/2010	3:24:00 PM	H2 MFC set to  0.000000
10/8/2010	3:24:00 PM	BCl3 MFC set to  0.000000
10/8/2010	3:24:00 PM	PHl3 MFC set to  0.000000
10/8/2010	3:24:00 PM	SiCl4 MFC set to  0.000000
10/8/2010	3:24:00 PM	Bypass solenoid MFC set to  0.000000
10/8/2010	3:24:00 PM	Tube furnace set to 0
10/8/2010	3:25:00 PM	H2 valve closed
10/8/2010	3:25:00 PM	BCl3 valve closed
10/8/2010	3:25:00 PM	PH3 valve closed
10/8/2010	3:25:00 PM	SiCl4 pre valve closed
10/8/2010	3:25:00 PM	SiCl4 post valve closed
10/8/2010	3:25:00 PM	Bubbler valve closed
10/8/2010	3:25:00 PM	Helium valve opened
10/8/2010	3:25:00 PM	Main Vac valve opened
10/8/2010	3:25:00 PM	Bypass valve opened
10/8/2010	3:25:00 PM	Helium MFC set to  100.000000
10/8/2010	3:25:00 PM	H2 MFC set to  0.000000
10/8/2010	3:25:00 PM	BCl3 MFC set to  0.000000
10/8/2010	3:25:00 PM	PHl3 MFC set to  0.000000
10/8/2010	3:25:00 PM	SiCl4 MFC set to  0.000000
10/8/2010	3:25:00 PM	Bypass solenoid MFC set to  0.000000
10/8/2010	3:25:00 PM	Tube furnace set to 0
10/8/2010	3:26:00 PM	Helium valve closed
10/8/2010	3:26:00 PM	H2 valve closed
10/8/2010	3:26:00 PM	BCl3 valve closed
10/8/2010	3:26:00 PM	PH3 valve closed
10/8/2010	3:26:00 PM	SiCl4 pre valve closed
10/8/2010	3:26:00 PM	SiCl4 post valve closed
10/8/2010	3:26:00 PM	Bubbler valve closed
10/8/2010	3:26:00 PM	Main Vac valve opened
10/8/2010	3:26:00 PM	Bypass valve opened
10/8/2010	3:26:00 PM	Helium MFC set to  0.000000
10/8/2010	3:26:00 PM	H2 MFC set to  0.000000
10/8/2010	3:26:00 PM	BCl3 MFC set to  0.000000
10/8/2010	3:26:00 PM	PHl3 MFC set to  0.000000
10/8/2010	3:26:00 PM	SiCl4 MFC set to  0.000000
10/8/2010	3:26:00 PM	Bypass solenoid MFC set to  0.000000
10/8/2010	3:26:00 PM	Tube furnace set to 0
10/8/2010	3:26:45 PM	H2 valve closed
10/8/2010	3:26:45 PM	BCl3 valve closed
10/8/2010	3:26:45 PM	PH3 valve closed
10/8/2010	3:26:45 PM	SiCl4 pre valve closed
10/8/2010	3:26:45 PM	SiCl4 post valve closed
10/8/2010	3:26:45 PM	Bubbler valve closed
10/8/2010	3:26:45 PM	Helium valve opened
10/8/2010	3:26:45 PM	Main Vac valve opened
10/8/2010	3:26:45 PM	Bypass valve opened
10/8/2010	3:26:45 PM	Helium MFC set to  100.000000
10/8/2010	3:26:45 PM	H2 MFC set to  0.000000
10/8/2010	3:26:45 PM	BCl3 MFC set to  0.000000
10/8/2010	3:26:45 PM	PHl3 MFC set to  0.000000
10/8/2010	3:26:45 PM	SiCl4 MFC set to  0.000000
10/8/2010	3:26:45 PM	Bypass solenoid MFC set to  0.000000
10/8/2010	3:26:45 PM	Tube furnace set to 0
10/8/2010	3:26:52 PM	Helium valve closed
10/8/2010	3:26:52 PM	H2 valve closed
10/8/2010	3:26:52 PM	BCl3 valve closed
10/8/2010	3:26:52 PM	PH3 valve closed
10/8/2010	3:26:52 PM	SiCl4 pre valve closed
10/8/2010	3:26:52 PM	SiCl4 post valve closed
10/8/2010	3:26:52 PM	Bubbler valve closed
10/8/2010	3:26:52 PM	Main Vac valve opened
10/8/2010	3:26:52 PM	Bypass valve opened
10/8/2010	3:26:52 PM	Helium MFC set to  0.000000
10/8/2010	3:26:52 PM	H2 MFC set to  0.000000
10/8/2010	3:26:52 PM	BCl3 MFC set to  0.000000
10/8/2010	3:26:52 PM	PHl3 MFC set to  0.000000
10/8/2010	3:26:52 PM	SiCl4 MFC set to  0.000000
10/8/2010	3:26:52 PM	Bypass solenoid MFC set to  0.000000
10/8/2010	3:26:52 PM	Tube furnace set to 0
10/8/2010	3:27:52 PM	H2 valve closed
10/8/2010	3:27:52 PM	BCl3 valve closed
10/8/2010	3:27:52 PM	PH3 valve closed
10/8/2010	3:27:52 PM	SiCl4 pre valve closed
10/8/2010	3:27:52 PM	SiCl4 post valve closed
10/8/2010	3:27:52 PM	Bubbler valve closed
10/8/2010	3:27:52 PM	Helium valve opened
10/8/2010	3:27:52 PM	Main Vac valve opened
10/8/2010	3:27:52 PM	Bypass valve opened
10/8/2010	3:27:52 PM	Helium MFC set to  100.000000
10/8/2010	3:27:52 PM	H2 MFC set to  0.000000
10/8/2010	3:27:52 PM	BCl3 MFC set to  0.000000
10/8/2010	3:27:52 PM	PHl3 MFC set to  0.000000
10/8/2010	3:27:52 PM	SiCl4 MFC set to  0.000000
10/8/2010	3:27:52 PM	Bypass solenoid MFC set to  0.000000
10/8/2010	3:27:52 PM	Tube furnace set to 0
10/8/2010	3:28:52 PM	Helium valve closed
10/8/2010	3:28:52 PM	H2 valve closed
10/8/2010	3:28:52 PM	BCl3 valve closed
10/8/2010	3:28:52 PM	PH3 valve closed
10/8/2010	3:28:52 PM	SiCl4 pre valve closed
10/8/2010	3:28:52 PM	SiCl4 post valve closed
10/8/2010	3:28:52 PM	Bubbler valve closed
10/8/2010	3:28:52 PM	Main Vac valve opened
10/8/2010	3:28:52 PM	Bypass valve opened
10/8/2010	3:28:52 PM	Helium MFC set to  0.000000
10/8/2010	3:28:52 PM	H2 MFC set to  0.000000
10/8/2010	3:28:52 PM	BCl3 MFC set to  0.000000
10/8/2010	3:28:52 PM	PHl3 MFC set to  0.000000
10/8/2010	3:28:52 PM	SiCl4 MFC set to  0.000000
10/8/2010	3:28:52 PM	Bypass solenoid MFC set to  0.000000
10/8/2010	3:28:53 PM	Tube furnace set to 0
10/8/2010	3:29:53 PM	H2 valve closed
10/8/2010	3:29:53 PM	BCl3 valve closed
10/8/2010	3:29:53 PM	PH3 valve closed
10/8/2010	3:29:53 PM	SiCl4 pre valve closed
10/8/2010	3:29:53 PM	SiCl4 post valve closed
10/8/2010	3:29:53 PM	Bubbler valve closed
10/8/2010	3:29:53 PM	Helium valve opened
10/8/2010	3:29:53 PM	Main Vac valve opened
10/8/2010	3:29:53 PM	Bypass valve opened
10/8/2010	3:29:53 PM	Helium MFC set to  100.000000
10/8/2010	3:29:53 PM	H2 MFC set to  0.000000
10/8/2010	3:29:53 PM	BCl3 MFC set to  0.000000
10/8/2010	3:29:53 PM	PHl3 MFC set to  0.000000
10/8/2010	3:29:53 PM	SiCl4 MFC set to  0.000000
10/8/2010	3:29:53 PM	Bypass solenoid MFC set to  0.000000
10/8/2010	3:29:53 PM	Tube furnace set to 0
10/8/2010	3:30:53 PM	Helium valve closed
10/8/2010	3:30:53 PM	H2 valve closed
10/8/2010	3:30:53 PM	BCl3 valve closed
10/8/2010	3:30:53 PM	PH3 valve closed
10/8/2010	3:30:53 PM	SiCl4 pre valve closed
10/8/2010	3:30:53 PM	SiCl4 post valve closed
10/8/2010	3:30:53 PM	Bubbler valve closed
10/8/2010	3:30:53 PM	Main Vac valve opened
10/8/2010	3:30:53 PM	Bypass valve opened
10/8/2010	3:30:53 PM	Helium MFC set to  0.000000
10/8/2010	3:30:53 PM	H2 MFC set to  0.000000
10/8/2010	3:30:53 PM	BCl3 MFC set to  0.000000
10/8/2010	3:30:53 PM	PHl3 MFC set to  0.000000
10/8/2010	3:30:53 PM	SiCl4 MFC set to  0.000000
10/8/2010	3:30:53 PM	Bypass solenoid MFC set to  0.000000
10/8/2010	3:30:53 PM	Tube furnace set to 0
10/8/2010	3:30:54 PM	Run finished at 3:30 PM
10/8/2010	3:30:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/8/2010	3:36:20 PM	Helium MFC set to  100.000000
10/8/2010	3:36:21 PM	Helium valve opened
10/8/2010	3:59:12 PM	Helium MFC set to  0.000000
10/8/2010	3:59:13 PM	Helium valve closed
10/8/2010	4:00:02 PM	Main Vac valve closed
10/8/2010	4:00:03 PM	Bypass valve closed
10/8/2010	4:00:08 PM	Bypass valve opened
10/8/2010	4:00:47 PM	Recipe started at 4:00 PM
10/8/2010	4:00:47 PM	Helium valve closed
10/8/2010	4:00:47 PM	BCl3 valve closed
10/8/2010	4:00:47 PM	PH3 valve closed
10/8/2010	4:00:47 PM	SiCl4 pre valve closed
10/8/2010	4:00:47 PM	SiCl4 post valve closed
10/8/2010	4:00:47 PM	Main Vac valve closed
10/8/2010	4:00:47 PM	Bypass valve closed
10/8/2010	4:00:47 PM	Bubbler valve closed
10/8/2010	4:00:47 PM	H2 valve opened
10/8/2010	4:00:47 PM	Helium MFC set to  0.000000
10/8/2010	4:00:47 PM	H2 MFC set to  500.000000
10/8/2010	4:00:47 PM	BCl3 MFC set to  0.000000
10/8/2010	4:00:47 PM	PHl3 MFC set to  0.000000
10/8/2010	4:00:47 PM	SiCl4 MFC set to  0.000000
10/8/2010	4:00:47 PM	Bypass solenoid MFC set to  0.000000
10/8/2010	4:00:47 PM	Tube furnace set to 100
10/8/2010	4:02:09 PM	Helium valve closed
10/8/2010	4:02:09 PM	BCl3 valve closed
10/8/2010	4:02:09 PM	PH3 valve closed
10/8/2010	4:02:09 PM	SiCl4 pre valve closed
10/8/2010	4:02:09 PM	SiCl4 post valve closed
10/8/2010	4:02:09 PM	Main Vac valve closed
10/8/2010	4:02:09 PM	Bypass valve closed
10/8/2010	4:02:09 PM	H2 valve opened
10/8/2010	4:02:09 PM	Bubbler valve opened
10/8/2010	4:02:09 PM	Helium MFC set to  0.000000
10/8/2010	4:02:09 PM	H2 MFC set to  500.000000
10/8/2010	4:02:09 PM	BCl3 MFC set to  0.000000
10/8/2010	4:02:09 PM	PHl3 MFC set to  0.000000
10/8/2010	4:02:09 PM	SiCl4 MFC set to  0.000000
10/8/2010	4:02:09 PM	Bypass solenoid MFC set to  0.000000
10/8/2010	4:02:09 PM	Tube furnace set to 1000
10/8/2010	4:22:09 PM	Helium valve closed
10/8/2010	4:22:09 PM	PH3 valve closed
10/8/2010	4:22:09 PM	Main Vac valve closed
10/8/2010	4:22:09 PM	Bypass valve closed
10/8/2010	4:22:09 PM	H2 valve opened
10/8/2010	4:22:09 PM	BCl3 valve opened
10/8/2010	4:22:09 PM	SiCl4 pre valve opened
10/8/2010	4:22:09 PM	SiCl4 post valve opened
10/8/2010	4:22:09 PM	Bubbler valve opened
10/8/2010	4:22:09 PM	Helium MFC set to  0.000000
10/8/2010	4:22:09 PM	H2 MFC set to  450.000000
10/8/2010	4:22:09 PM	BCl3 MFC set to  12.000000
10/8/2010	4:22:09 PM	PHl3 MFC set to  0.000000
10/8/2010	4:22:09 PM	SiCl4 MFC set to  50.000000
10/8/2010	4:22:09 PM	Bypass solenoid MFC set to  0.000000
10/8/2010	4:22:09 PM	Tube furnace set to 1000
10/8/2010	4:37:09 PM	H2 valve closed
10/8/2010	4:37:09 PM	BCl3 valve closed
10/8/2010	4:37:09 PM	PH3 valve closed
10/8/2010	4:37:09 PM	SiCl4 pre valve closed
10/8/2010	4:37:09 PM	SiCl4 post valve closed
10/8/2010	4:37:09 PM	Main Vac valve closed
10/8/2010	4:37:09 PM	Bypass valve closed
10/8/2010	4:37:09 PM	Helium valve opened
10/8/2010	4:37:09 PM	Bubbler valve opened
10/8/2010	4:37:09 PM	Helium MFC set to  500.000000
10/8/2010	4:37:09 PM	H2 MFC set to  0.000000
10/8/2010	4:37:09 PM	BCl3 MFC set to  0.000000
10/8/2010	4:37:09 PM	PHl3 MFC set to  0.000000
10/8/2010	4:37:09 PM	SiCl4 MFC set to  0.000000
10/8/2010	4:37:09 PM	Bypass solenoid MFC set to  0.000000
10/8/2010	4:37:09 PM	Tube furnace set to 0
10/8/2010	4:57:09 PM	Helium valve closed
10/8/2010	4:57:09 PM	H2 valve closed
10/8/2010	4:57:09 PM	BCl3 valve closed
10/8/2010	4:57:09 PM	PH3 valve closed
10/8/2010	4:57:09 PM	SiCl4 pre valve closed
10/8/2010	4:57:09 PM	SiCl4 post valve closed
10/8/2010	4:57:09 PM	Main Vac valve closed
10/8/2010	4:57:09 PM	Bypass valve closed
10/8/2010	4:57:09 PM	Bubbler valve closed
10/8/2010	4:57:09 PM	Helium MFC set to  0.000000
10/8/2010	4:57:09 PM	H2 MFC set to  0.000000
10/8/2010	4:57:09 PM	BCl3 MFC set to  0.000000
10/8/2010	4:57:09 PM	PHl3 MFC set to  0.000000
10/8/2010	4:57:09 PM	SiCl4 MFC set to  0.000000
10/8/2010	4:57:09 PM	Bypass solenoid MFC set to  0.000000
10/8/2010	4:57:09 PM	Tube furnace set to 0
10/8/2010	4:57:09 PM	Run finished at 4:57 PM
10/8/2010	5:01:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/8/2010	5:01:51 PM	Recipe started at 5:01 PM
10/8/2010	5:01:51 PM	Helium valve closed
10/8/2010	5:01:51 PM	H2 valve closed
10/8/2010	5:01:51 PM	BCl3 valve closed
10/8/2010	5:01:51 PM	PH3 valve closed
10/8/2010	5:01:51 PM	SiCl4 pre valve closed
10/8/2010	5:01:51 PM	SiCl4 post valve closed
10/8/2010	5:01:51 PM	Main Vac valve closed
10/8/2010	5:01:51 PM	Bubbler valve closed
10/8/2010	5:01:51 PM	Bypass valve opened
10/8/2010	5:01:51 PM	Helium MFC set to  0.000000
10/8/2010	5:01:51 PM	H2 MFC set to  0.000000
10/8/2010	5:01:51 PM	BCl3 MFC set to  0.000000
10/8/2010	5:01:51 PM	PHl3 MFC set to  0.000000
10/8/2010	5:01:51 PM	SiCl4 MFC set to  0.000000
10/8/2010	5:01:51 PM	Bypass solenoid MFC set to  0.000000
10/8/2010	5:01:52 PM	Tube furnace set to 0
10/8/2010	5:02:39 PM	Helium valve closed
10/8/2010	5:02:39 PM	H2 valve closed
10/8/2010	5:02:39 PM	BCl3 valve closed
10/8/2010	5:02:39 PM	PH3 valve closed
10/8/2010	5:02:39 PM	SiCl4 pre valve closed
10/8/2010	5:02:39 PM	SiCl4 post valve closed
10/8/2010	5:02:39 PM	Bubbler valve closed
10/8/2010	5:02:39 PM	Main Vac valve opened
10/8/2010	5:02:39 PM	Bypass valve opened
10/8/2010	5:02:39 PM	Helium MFC set to  0.000000
10/8/2010	5:02:39 PM	H2 MFC set to  0.000000
10/8/2010	5:02:39 PM	BCl3 MFC set to  0.000000
10/8/2010	5:02:39 PM	PHl3 MFC set to  0.000000
10/8/2010	5:02:39 PM	SiCl4 MFC set to  0.000000
10/8/2010	5:02:39 PM	Bypass solenoid MFC set to  0.000000
10/8/2010	5:02:39 PM	Tube furnace set to 0
10/8/2010	5:02:39 PM	Run finished at 5:02 PM
10/8/2010	5:02:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
